Patents by Inventor Andreas Muehe

Andreas Muehe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for pulling a cylindrical crystal from a melt
    Patent number: 11965267
    Abstract: A method for pulling a cylindrical crystal from a melt by a crystal pulling unit includes measuring an actual value of a diameter of the crystal at a surface of the melt, comparing the actual value with a setpoint value for the diameter of the crystal, and setting a height of the annular gap as a function of a deviation between the actual value and the setpoint value using a first controller which has a first readjustment time.
    Type: Grant
    Filed: January 24, 2020
    Date of Patent: April 23, 2024
    Assignee: PVA TePla AG
    Inventor: Andreas Muehe
  • Monocrystalline semiconductor wafer and method for producing a semiconductor wafer
    Patent number: 11075070
    Abstract: A monocrystalline semiconductor wafers have an average roughness Ra of at most 0.8 nm at a limiting wavelength of 250 ?m, and an ESFQRavg of 8 nm or less given an edge exclusion of 1 mm. The wafers are advantageously produced by a method comprising the following steps in the indicated order: a) simultaneous double-side polishing of the semiconductor wafer, b) local material-removing processing of at least one part of at least one side of the semiconductor wafer using a fluid jet which contains suspended hard substance particles and which is directed onto a small region of the surface with the aid of a nozzle, wherein the nozzle is moved over that part of the surface which is to be treated in such a way that a predefined geometry parameter of the semiconductor wafer is improved, and c) polishing of the at least one surface of the semiconductor wafer.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: July 27, 2021
    Assignee: SILTRONIC AG
    Inventors: Klaus Roettger, Herbert Becker, Leszek Mistur, Andreas Muehe
  • Device for pulling a single crystal
    Patent number: 8470093
    Abstract: A device for pulling a single crystal from a melt having a widened portion between an upper and a lower neck portion including a pulling device having a pulling device cable drum configured to wind a pulling cable, the pulling cable configured to pull the single crystal and a supporting device configured to relieve the upper neck portion of a weight of the single crystal.
    Type: Grant
    Filed: September 16, 2009
    Date of Patent: June 25, 2013
    Assignee: Siltronic AG
    Inventors: Andreas Muehe, Alfred Miller, Johann-Andreas Huber
  • DEVICE FOR PULLING A SINGLE CRYSTAL
    Publication number: 20100064965
    Abstract: A device for pulling a single crystal from a melt having a widened portion between an upper and a lower neck portion including a pulling device having a pulling device cable drum configured to wind a pulling cable, the pulling cable configured to pull the single crystal and a supporting device configured to relieve the upper neck portion of a weight of the single crystal.
    Type: Application
    Filed: September 16, 2009
    Publication date: March 18, 2010
    Applicant: SILTRONIC AG
    Inventors: Andreas Muehe, Alfred Miller, Johann-Andreas Huber