Patents by Inventor Andreas Neuber
Andreas Neuber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240077890Abstract: The present disclosure generally relates to methods and system used to collect waste fluids. A system controller is disclosed to control the operation of at least a portion of the system. The controller has a CPU. The fabrication facility includes a first processing system having fluid dispensed therein for processing a material on a part. A first drain is configured to collect the processing fluid as waste fluid after processing the part. The fabrication facility also includes a waste collection system fluidly coupled to the system drain. The waste collection system has two or more valves configured to couple the system drain and two or more facility drains. Each facility drain is uniquely coupled to one of the two or more valves. The CPU is configured to operate the valves between an open and a closed state in response to the fluid entering the system drain.Type: ApplicationFiled: September 1, 2022Publication date: March 7, 2024Inventors: Maxime CAYER, John L. KOENIG, Tony H. TONG, Shaun W. CRAWFORD, James L'HEUREUX, Andreas NEUBER, Ching-Hong HSIEH
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Publication number: 20240053226Abstract: The invention relates to a wear part (10E). The wear part (10E) has a part interior (14) and a wear layer (12E). The wear layer (12E) is produced by additive manufacturing, covers the part interior (14) and has a wear indicator (18E) which is produced by additive manufacturing and is designed to indicate a state of wear of the wear part (10E) if the wear indicator (18E) is exposed and/or removed due to wear. Advantageously, the wear part (10E) can allow a simple wear monitoring by monitoring the wear indicator (18E).Type: ApplicationFiled: December 9, 2021Publication date: February 15, 2024Inventors: Reinhard ORTNER, Andreas NEUBER
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Publication number: 20220341821Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.Type: ApplicationFiled: April 26, 2021Publication date: October 27, 2022Inventors: Ryan T. DOWNEY, Hemant P. MUNGEKAR, James L'HEUREUX, Andreas NEUBER, Michael W. JOHNSON, Joseph A. VAN GOMPEL, Gino Gerardo CRISPIERI, Tony H. TONG, Maxime CAYER, John L. KOENIG, Mike M. HUANG
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Publication number: 20220333238Abstract: Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.Type: ApplicationFiled: July 1, 2022Publication date: October 20, 2022Inventor: Andreas NEUBER
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Patent number: 11396699Abstract: Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.Type: GrantFiled: August 19, 2019Date of Patent: July 26, 2022Assignee: Applied Materials, Inc.Inventor: Andreas Neuber
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Publication number: 20190368037Abstract: Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.Type: ApplicationFiled: August 19, 2019Publication date: December 5, 2019Inventor: Andreas NEUBER
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Patent number: 10460960Abstract: Embodiments of a system, a gas panel and method thereof having reduced exhaust requirements for the delivery of gases include distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present. Embodiments can further include monitoring for leaks in the interior portion of the gas panel and, in response to a detected leak, increasing the distribution of the inert gas in at least the portion of the gas panel in which the leak was detected. Embodiments may further include exhausting gases out of the gas panel. In such embodiments, in response to a detected leak, a rate of the exhausting of the gases is increased. The gas panel can also be sealed to reduce an amount of gas that leaks out of or air that enters into the gas panel.Type: GrantFiled: December 8, 2016Date of Patent: October 29, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Ashish Kumar, Vijayakumar Venugopal, Niladri Roy, Ramachandra Murthy Gunturi, Andreas Neuber, Stephen C. Wolgast
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Patent number: 10428420Abstract: Subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.Type: GrantFiled: April 26, 2016Date of Patent: October 1, 2019Assignee: APPLIED MATERIALS, INC.Inventor: Andreas Neuber
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Publication number: 20170322568Abstract: Embodiments of a system, a gas panel and method thereof having reduced exhaust requirements for the delivery of gases include distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present. Embodiments can further include monitoring for leaks in the interior portion of the gas panel and, in response to a detected leak, increasing the distribution of the inert gas in at least the portion of the gas panel in which the leak was detected. Embodiments may further include exhausting gases out of the gas panel. In such embodiments, in response to a detected leak, a rate of the exhausting of the gases is increased. The gas panel can also be sealed to reduce an amount of gas that leaks out of or air that enters into the gas panel.Type: ApplicationFiled: December 8, 2016Publication date: November 9, 2017Inventors: ASHISH KUMAR, VIJAYAKUMAR VENUGOPAL, NILADRI ROY, RAMACHANDRA MURTHY GUNTURI, ANDREAS NEUBER, STEPHEN C. WOLGAST
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Publication number: 20160326643Abstract: Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.Type: ApplicationFiled: April 26, 2016Publication date: November 10, 2016Inventor: Andreas NEUBER
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Patent number: 9080576Abstract: Methods and apparatus for controlling a processing system are provided herein. In some embodiments, a method of controlling a processing system may include operating a vacuum pump coupled to a process chamber at a first baseline pump idle speed selected to maintain the process chamber at a pressure equal to a first baseline pump idle pressure; monitoring the pressure in the process chamber while operating the vacuum pump at the first baseline pump idle speed; and determining whether the first baseline pump idle pressure can be maintained in the process chamber when the vacuum pump is operating at the first baseline pump idle speed.Type: GrantFiled: January 27, 2012Date of Patent: July 14, 2015Assignee: APPLIED MATERIALS, INC.Inventors: Youssef Loldj, Jay J. Jung, Mehran Moalem, Paul E. Fisher, Joshua Putz, Andreas Neuber
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Patent number: 8874416Abstract: A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.Type: GrantFiled: November 30, 2011Date of Patent: October 28, 2014Assignee: Applied Materials, Inc.Inventors: Krishna Vepa, Parris C. M. Hawkins, Andreas Neuber
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Publication number: 20120204965Abstract: Methods and apparatus for controlling a processing system are provided herein. In some embodiments, a method of controlling a processing system may include operating a vacuum pump coupled to a process chamber at a first baseline pump idle speed selected to maintain the process chamber at a pressure equal to a first baseline pump idle pressure; monitoring the pressure in the process chamber while operating the vacuum pump at the first baseline pump idle speed; and determining whether the first baseline pump idle pressure can be maintained in the process chamber when the vacuum pump is operating at the first baseline pump idle speed.Type: ApplicationFiled: January 27, 2012Publication date: August 16, 2012Applicant: APPLIED MATERIALS, INC.Inventors: YOUSSEF LOLDJ, JAY J. JUNG, MEHRAN MOALEM, PAUL E. FISHER, JOSHUA PUTZ, ANDREAS NEUBER
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Publication number: 20120143574Abstract: A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.Type: ApplicationFiled: November 30, 2011Publication date: June 7, 2012Inventors: Krishna Vepa, Parris C.M. Hawkins, Andreas Neuber
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Publication number: 20120091099Abstract: Methods and apparatus for recovery and reuse of reagents are provided herein. In some embodiments, a system for processing substrates may include a process chamber for processing a substrate; a reagent source coupled to the process chamber to provide a reagent to the process chamber; and a reagent recovery system to collect, and at least one of purify or concentrate the reagent recovered from an effluent exhausted from the process chamber. In some embodiments, a method for recovering unreacted reagent may include providing reagent from a reagent source to a process chamber; exposing a substrate disposed in the process chamber to the reagent, forming an effluent; exhausting the effluent from the process chamber; and recovering unreacted reagent from the effluent in a reagent recovery system.Type: ApplicationFiled: September 21, 2011Publication date: April 19, 2012Applicant: APPLIED MATERIALS, INC.Inventors: MICHAEL KIEFER, ANDREAS NEUBER, DENIS DAVID, DANIEL O. CLARK, PHIL CHANDLER
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Publication number: 20110070811Abstract: The present invention generally relates to apparatus and method for recycling both polishing slurry and rinse water from CMP processes. The present invention also relates to rheology measurements and agglomeration prevention using centrifugal pumps.Type: ApplicationFiled: March 23, 2010Publication date: March 24, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Andreas Neuber, Phil Chandler, Clifford C. Stow, Daniel O. Clark, Michael Kiefer, Jamie Stuart Leighton
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Publication number: 20110023908Abstract: Methods and apparatus for recovering hydrogen fluoride (HF) are provided herein. In some embodiments, an apparatus includes a system for processing substrates, including a process chamber for processing a substrate; a fluorine generator coupled to the process chamber to provide fluorine (F2) thereto; an abatement system coupled to the process chamber to abate fluorine-containing effluents exhausted from the process chamber and to convert at least a portion of the fluorine-containing effluents into hydrogen fluoride (HF); an HF recovery system configured to at least one of collect, purify, or concentrate the HF converted by the abatement system; and a conduit for providing the recovered hydrogen fluoride (HF) to the fluorine generator or another application in the manufacturing process.Type: ApplicationFiled: July 16, 2010Publication date: February 3, 2011Applicant: APPLIED MATERIALS, INC.Inventors: ANDREAS NEUBER, PHIL CHANDLER, CLIFFORD C. STOW, DANIEL O. CLARK, MICHAEL KIEFER
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Publication number: 20100249968Abstract: A method and system for factory resource optimization identification is described herein. In one embodiment, an expected usage rate is determined for a resource in a manufacturing facility and an actual usage rate is determined for the resource in the manufacturing facility. A comparison between the expected usage rate and the actual usage rate is facilitated. A determination is made, based on the comparison, of whether a variance between the expected usage rate and the actual usage rate exceeds a threshold. A notification is provided if the variance exceeds the threshold.Type: ApplicationFiled: March 24, 2010Publication date: September 30, 2010Inventors: Andreas Neuber, Parth Sethia, Parris C.M. Hawkins, Krishna Vepa, Raymond Murray
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Publication number: 20100096110Abstract: Methods and apparatus for recovering heat from disposed effluents are disclosed herein. In some embodiments, an apparatus may include a first process chamber configured for gaseous or liquid processes; a second process chamber configured for liquid processes; and a heat pump having a compressor and a first heat exchanger, wherein the compressor is configured to use a first effluent exhausted from the first process chamber and wherein the first heat exchanger having first and second sides configured to transfer heat therebetween, wherein the first side is configured to flow a liquid reagent therethrough and into the second process chamber, and wherein the second side is configured to flow the pressurized first effluent from the first process chamber therethrough. In some embodiments, a heater may be disposed between the heat pump and the second process chamber to further heat the liquid reagent prior to entering the second process chamber.Type: ApplicationFiled: October 15, 2009Publication date: April 22, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Andreas Neuber, Daniel O. Clark
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Patent number: D692114Type: GrantFiled: July 2, 2012Date of Patent: October 22, 2013Assignees: Microzap, Inc.Inventors: Willis Don Stull, Jr., Andreas A. Neuber