Abstract: An apparatus, in particular end effector, for receiving, transporting and/or positioning a wafer frame which is covered by a carrier film for carrying a wafer, has a holder which has vacuum nozzles for holding the wafer frame on the apparatus, and has a centering device which has at least one stop, which can engage in a cutout in the wafer frame, for centering the wafer frame. In order to precisely position the wafer frame, the holder has Bernoulli nozzles for holding and moving the wafer frame in the direction of the stop without contact, and the stop is mounted such that it can be adjusted against the movement direction generated by the Bernoulli nozzles from an initial position to a centering position, which differs from the initial position, for centering the wafer frame.

Abstract: An apparatus, in particular end effector, for receiving, transporting and/or positioning a wafer frame which is covered by a carrier film for carrying a wafer, has a holder which has vacuum nozzles for holding the wafer frame on the apparatus, and has a centering device which has at least one stop, which can engage in a cutout in the wafer frame, for centering the wafer frame. In order to precisely position the wafer frame, the holder has Bernoulli nozzles for holding and moving the wafer frame in the direction of the stop without contact, and the stop is mounted such that it can be adjusted against the movement direction generated by the Bernoulli nozzles from an initial position to a centering position, which differs from the initial position, for centering the wafer frame.