Patents by Inventor Andreas Schmalen

Andreas Schmalen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hot-wire method for depositing semiconductor material on a substrate and device for performing the method
    Patent number: 9589794
    Abstract: A hot wire device and method for depositing semiconductor material onto a substrate in a deposition chamber in which the ends of at least two filaments are clamped into a filament holder and heated by supplying current, wherein a voltage for generating an electrical current is applied in temporal succession to filaments made of differing materials so that a number of differing semiconductors corresponding to the number of consecutively heated filament materials can be consecutively deposited onto the substrate without opening the chamber.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: March 7, 2017
    Assignee: Forschungszentrum Juelich GmbH
    Inventors: Friedhelm Finger, Andreas Schmalen, Johannes Wolff
  • HOT-WIRE METHOD FOR DEPOSITING SEMICONDUCTOR MATERIAL ON A SUBSTRATE AND DEVICE FOR PERFORMING THE METHOD
    Publication number: 20140235036
    Abstract: A hot wire device and method for depositing semiconductor material onto a substrate in a deposition chamber in which the ends of at least two filaments are clamped into a filament holder and heated by supplying current, wherein a voltage for generating an electrical current is applied in temporal succession to filaments made of differing materials so that a number of differing semiconductors corresponding to the number of consecutively heated filament materials can be consecutively deposited onto the substrate without opening the chamber.
    Type: Application
    Filed: March 30, 2012
    Publication date: August 21, 2014
    Applicant: FORSCHUNGSZENTRUM JUELICH GMBH
    Inventors: Friedhelm Finger, Andreas Schmalen, Johannes Wolff