Patents by Inventor Andreas Schmaunz

Andreas Schmaunz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240047175
    Abstract: A method of operating a particle beam system comprises determining values of operating parameters of the particle beam system, and operating the particle beam system with the determined values of the operating parameters, and also recording a particle-microscopic image of a sample via the particle beam system. The operating parameters can represent at least a magnitude of a flow of a gas fed to the sample for charge compensation, a current of a particle beam directed at the sample for recording the image, a kinetic energy of the particles of the particle beam upon impinging on the sample, a scanning speed of the particle beam over the sample for recording the image, and a magnification of the recorded image.
    Type: Application
    Filed: August 3, 2023
    Publication date: February 8, 2024
    Inventors: Andreas Schmaunz, Simon Diemer
  • Publication number: 20240029996
    Abstract: While the sample is in a vacuum chamber of the particle beam system, a method comprises: processing the sample via an automatic supply in accordance with a process gas supply setting of at least one of a plurality of different process gases to the sample via a process gas supply device and via an activation of the supplied, at least one process gas by a particle beam of charged particles or a laser beam; measuring a property of the processed sample using a measuring device; modifying the process gas supply setting so that there is a change in a ratio of the quantities of the process gases to be supplied, on the basis of a measurement result obtained by the measurement; and continuing the processing of the sample using the modified process gas supply setting.
    Type: Application
    Filed: July 18, 2023
    Publication date: January 25, 2024
    Inventors: Andreas Schmaunz, Gero Walter
  • Publication number: 20230420224
    Abstract: Operating a gas feed device for a particle beam apparatus includes predetermining a flow rate of a precursor through an outlet of a precursor reservoir containing the precursor to be fed onto an object, loading a temperature of the precursor reservoir, the temperature being associated with the predetermined flow rate, from a database into a control unit, setting a temperature of the precursor reservoir to the temperature loaded from the database using a temperature setting unit, and determining at least one functional parameter of the precursor reservoir depending on the flow rate and the temperature, loaded from the database, using the control unit and informing a user of the gas feed device about the determined functional parameter. Informing the user of the gas feed device about the functional parameter may include displaying the functional parameter on a display unit, outputting an optical signal, or outputting an acoustic signal.
    Type: Application
    Filed: August 7, 2023
    Publication date: December 28, 2023
    Applicant: Carl Zeiss Microscopy GmbH
    Inventor: Andreas Schmaunz
  • Patent number: 11837434
    Abstract: A method for setting position of a component of a particle beam apparatus may be performed, for example, by the particle beam apparatus. The component may be embodied as a gas feed device, as a particle detector and/or as a beam detector. The method may include: aligning the component with a coincidence point of a particle beam of the particle beam apparatus, determining a rotation angle of a rotation of an object carrier about a rotation axis, loading a position of the component associated with the rotation angle from a database into a control unit, transmitting a control signal from the control unit to a drive unit for moving the component, and moving the component into the position loaded from the database by means of the drive unit, wherein the component arranged in the loaded position is at a pre-definable distance from the object.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: December 5, 2023
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Gero Walter, Bernd Stenke
  • Publication number: 20230326707
    Abstract: An object receiving container may receive an object which is examinable, analyzable and/or processable at cryo-temperatures. An object holding system may comprise an object receiving container. A beam apparatus or an apparatus for processing an object may comprise an object receiving container or an object holding system. An object may be examined, analyzed and/or processed using an object receiving container or an object holding system. The object receiving container may comprise a first container unit, a cavity for receiving the object, a second container unit, which is able to be brought into a first position and/or into a second position relative to the first container unit, and at least one fastening device which is arranged at the first container unit or at the second container unit for arranging the object receiving container at a holding device.
    Type: Application
    Filed: June 13, 2023
    Publication date: October 12, 2023
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schertel, Andreas Schmaunz, Endre Majorovits, Bernd Stenke, Stephan Hiller, Matthias Karl
  • Patent number: 11764036
    Abstract: A gas feed device is operated, including displaying a functional parameter of the gas feed device. A gas feed device may carry out the operation, and a particle beam apparatus may include the gas feed device. A method may include predetermining and/or measuring a current temperature of a precursor reservoir of the gas feed device using a temperature measuring unit, where the precursor reservoir contains a precursor to be fed onto an object, loading a flow rate of the precursor through an outlet of the precursor reservoir from a database into a control unit, said flow rate being associated with the current temperature of the precursor reservoir, and (i) displaying the flow rate on the display unit and/or (ii) determining the functional parameter of the precursor reservoir depending on the flow rate using the control unit and informing a user of the gas feed device about the determined functional parameter.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: September 19, 2023
    Assignee: Carl Zeiss Microscopy GmbH
    Inventor: Andreas Schmaunz
  • Publication number: 20230282442
    Abstract: The invention relates to a gas reservoir (3000) for receiving a precursor (3035). The gas reservoir (3000) has a gas-receiving unit (3004) which is arranged in a first receiving unit (3002) of a basic body (3001), and a sliding unit (3007) which is arranged movably in a second receiving unit (3003) of the basic body (3001). The gas-receiving unit (3004) has a movable closure unit (3006) for opening or closing a gas outlet opening (3005) of the gas-receiving unit (3004). In a first position of the sliding unit (3007), both a first opening (3009) of a sliding-unit line device (3008) is fluidically connected to a first basic body opening (3011) and a second opening (3010) of the sliding-unit line device (3008) is fluidically connected to a second basic body opening (3012). In the second position of the sliding unit (3007), both the first opening (3009) is arranged at an inner wall (3015) of the second receiving unit (3003) and the second opening (3010) is arranged at the movable closure unit (3006).
    Type: Application
    Filed: December 12, 2022
    Publication date: September 7, 2023
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Gero Walter, Bernd Stenke, Gerald Schmid
  • Patent number: 11721518
    Abstract: An object receiving container may receive an object which is examinable, analyzable and/or processable at cryo-temperatures. An object holding system may comprise an object receiving container. A beam apparatus or an apparatus for processing an object may comprise an object receiving container or an object holding system. An object may be examined, analyzed and/or processed using an object receiving container or an object holding system. The object receiving container may comprise a first container unit, a cavity for receiving the object, a second container unit, which is able to be brought into a first position and/or into a second position relative to the first container unit, and at least one fastening device which is arranged at the first container unit or at the second container unit for arranging the object receiving container at a holding device.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: August 8, 2023
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schertel, Andreas Schmaunz, Endre Majorovits, Bernd Stenke, Stephan Hiller, Matthias Karl
  • Publication number: 20230241650
    Abstract: A gas feed device includes a feed unit that feeds a gaseous state of a first precursor and/or a gaseous state of a second precursor, a first line device that conducts the gaseous state of the first precursor to the feed unit and a second line device that conducts the gaseous state of the second precursor to the feed unit. A first valve is arranged between the first line device and the feed unit. A second valve is arranged between the second line device and the feed unit. A control valve is connected to the first valve and is arranged between the first valve and the feed unit. The control valve is connected to the second valve and is arranged between the second valve and the feed unit. The first valve, the second valve and/or the control valve may be magnetic valve(s).
    Type: Application
    Filed: December 12, 2022
    Publication date: August 3, 2023
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Gero Walter, Bernd Stenke, Gerald Schmid
  • Publication number: 20230215688
    Abstract: The system described herein relates to a gas feed device having a first precursor reservoir that receives a first precursor and having a second precursor reservoir that receives a second precursor, a feed unit that feeds a gaseous state of the first precursor and/or a gaseous state of the second precursor onto a surface of an object. A first line device is arranged between the first precursor reservoir and the feed unit. A second line device is arranged between the second precursor reservoir and the feed unit. A first valve is arranged between the first line device and the feed unit. A second valve is arranged between the second line device and the feed unit. A control valve for the feed of the gaseous state of the first precursor and/or the gaseous state of the second precursor is connected to the first valve, the second valve and the feed unit.
    Type: Application
    Filed: December 12, 2022
    Publication date: July 6, 2023
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Gero Walter, Bernd Stenke, Gerald Schmid
  • Patent number: 11355310
    Abstract: A method is carried out with the aid of a particle beam microscope which includes a particle beam column for producing a beam of charged particles, the particle beam column having an optical axis. Furthermore, the particle beam microscope includes a holding device for holding the extracted micro-sample. The method includes holding the extracted micro-sample and an adjacent hinge element via the holding device. The micro-sample adopts a first spatial orientation relative to the optical axis. The method also includes producing a bending edge in the hinge element by way of irradiation with a beam of charged particles such that the adjacent micro-sample is moved in space and the spatial orientation of the micro-sample is altered. The method further includes holding the micro-sample in a second spatial orientation relative to the optical axis, wherein the second spatial orientation differs from the first spatial orientation.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: June 7, 2022
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Holger Doemer, Andreas Schmaunz
  • Patent number: 11347043
    Abstract: A particle beam apparatus and/or a light microscope is operated. A first temperature of an object may be changed, where the object may be arranged on an object receiving device rendered movable by a motor operated by a supply current. Changing the first temperature of the object may alter a second temperature of the object-receiving device from a first temperature value to a second temperature value. The supply current of the motor may be changed from a first current value to a second current value, where the supply current is designed to hold the object-receiving device in position, and a temperature of the object-receiving device may be changed from the second temperature value to a third temperature value on account of heat generated by the motor, which may be obtained by the second current value of the supply current and fed to the object receiving device.
    Type: Grant
    Filed: October 29, 2020
    Date of Patent: May 31, 2022
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Gero Walter, Stephan Hiller
  • Publication number: 20220130639
    Abstract: The invention relates to a method for ablating a material (1) from a material unit (502) and for arranging the material (1) on an object (125), the object (125) being arranged in a particle beam apparatus. Further, the invention relates to a computer program product, and to a particle beam apparatus for carrying out the method. The method comprises feeding a particle beam with charged particles onto the material (1), wherein the material (1) is arranged on the material unit (502) and/or wherein the material unit (502) is formed from the material (1), wherein the material (1) is ablatable from the material unit (502) and wherein the material (1) is arranged on the material unit (502) at a distance from the object (125). Further, the method comprises ablating the ablatable material (1) arranged on the material unit (502) from the material unit (502) using the particle beam, and arranging the ablated material (514) on the object (125).
    Type: Application
    Filed: May 5, 2021
    Publication date: April 28, 2022
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Holger Doemer, Michele Nicoletti, Andreas Schmaunz
  • Patent number: 11158485
    Abstract: A particle beam device comprises a first particle beam column for providing a first particle beam and a second particle beam column for providing a second particle beam. Operating the particle beam device may include: supplying the second particle beam with second charged particles onto an object using the second particle beam column, loading a value of a control parameter into a control unit from a database or calculating the value of the control parameter in the control unit, setting an objective lens excitation of a first objective lens of the first particle beam column using the value of the control parameter, detecting second interaction particles using a particle detector. The second interaction particles may emerge from an interaction of the second particle beam with the object when the second particle beam is incident on the object.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: October 26, 2021
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Wolfgang Berger
  • Publication number: 20210296087
    Abstract: A method is carried out with the aid of a particle beam microscope which includes a particle beam column for producing a beam of charged particles, the particle beam column having an optical axis. Furthermore, the particle beam microscope includes a holding device for holding the extracted micro-sample. The method includes holding the extracted micro-sample and an adjacent hinge element via the holding device. The micro-sample adopts a first spatial orientation relative to the optical axis. The method also includes producing a bending edge in the hinge element by way of irradiation with a beam of charged particles such that the adjacent micro-sample is moved in space and the spatial orientation of the micro-sample is altered. The method further includes holding the micro-sample in a second spatial orientation relative to the optical axis, wherein the second spatial orientation differs from the first spatial orientation.
    Type: Application
    Filed: March 16, 2021
    Publication date: September 23, 2021
    Inventors: Holger Doemer, Andreas Schmaunz
  • Publication number: 20210271063
    Abstract: The invention relates to a method for operating a particle beam apparatus and/or a light microscope, to a computer program product and to a particle beam apparatus and a light microscope, by means of which this method is able to be carried out. The method includes a change in a first temperature of an object, wherein the object is arranged on an object receiving device rendered movable by a motor operated by a supply current. Changing the first temperature of the object alters a second temperature of the object receiving device from a first temperature value to a second temperature value.
    Type: Application
    Filed: October 29, 2020
    Publication date: September 2, 2021
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Gero Walter, Stephan Hiller
  • Publication number: 20210241992
    Abstract: An object receiving container may receive an object which is examinable, analyzable and/or processable at cryo-temperatures. An object holding system may comprise an object receiving container. A beam apparatus or an apparatus for processing an object may comprise an object receiving container or an object holding system. An object may be examined, analyzed and/or processed using an object receiving container or an object holding system. The object receiving container may comprise a first container unit, a cavity for receiving the object, a second container unit, which is able to be brought into a first position and/or into a second position relative to the first container unit, and at least one fastening device which is arranged at the first container unit or at the second container unit for arranging the object receiving container at a holding device.
    Type: Application
    Filed: January 28, 2021
    Publication date: August 5, 2021
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schertel, Andreas Schmaunz, Endre Majorovits, Bernd Stenke, Stephan Hiller, Matthias Karl
  • Publication number: 20200388463
    Abstract: The invention relates to a method for operating a particle beam device and a particle beam device for carrying out the method. The particle beam device comprises a first particle beam column for providing a first particle beam and a second particle beam column for providing a second particle beam.
    Type: Application
    Filed: March 13, 2020
    Publication date: December 10, 2020
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Wolfgang Berger
  • Patent number: 10839491
    Abstract: A method of recording an image using a particle microscope includes recording of plural images of an object. Each of the recorded images is associated with image data including intensity values associated with locations in a coordinate system of the recorded image. The method further includes: determining displacements between the coordinate systems of the image data of the recorded images; determining a bounding box of a resulting image based on the determined displacements; and calculating image data of the resulting image based on the intensity values of the image data of the recorded images associated with those locations which are located within the determined bounding box associated with the resulting image based on the determined displacements of the recorded images.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: November 17, 2020
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Luyang Han, Andreas Schmaunz, Martin Edelmann
  • Publication number: 20200335309
    Abstract: A gas feed device is operated, including displaying a functional parameter of the gas feed device. A gas feed device may carry out the operation, and a particle beam apparatus may include the gas feed device. A method may include predetermining and/or measuring a current temperature of a precursor reservoir of the gas feed device using a temperature measuring unit, where the precursor reservoir contains a precursor to be fed onto an object, loading a flow rate of the precursor through an outlet of the precursor reservoir from a database into a control unit, said flow rate being associated with the current temperature of the precursor reservoir, and (i) displaying the flow rate on the display unit and/or (ii) determining the functional parameter of the precursor reservoir depending on the flow rate using the control unit and informing a user of the gas feed device about the determined functional parameter.
    Type: Application
    Filed: December 19, 2019
    Publication date: October 22, 2020
    Applicant: Carl Zeiss Microscopy GmbH
    Inventor: Andreas Schmaunz