Abstract: Disclosed are isolation techniques for bulk FinFETs. A semiconductor device includes a semiconductor substrate with a fin structure on the semiconductor substrate. The fin structure is perpendicular to the semiconductor substrate and has an upper portion and a lower portion. Source and drain regions are adjacent to the fin structure. A gate structure surrounds the upper portion of the fin structure. A well contact point is provided in the semiconductor substrate. The lower portion of the fin structure includes a sub-fin between the region surrounded by the gate structure and the semiconductor substrate. The sub-fin directly contacts the semiconductor substrate. The upper portion of the fin structure and an upper portion of the sub-fin are undoped. A lower portion of the sub-fin may be doped. Electrical potential applied from the well contact point to the lower portion of the sub-fin reduces leakage currents from the upper portion of the fin structure.

Abstract: A semiconductor device including a gate structure on a channel region portion of a fin structure, and at least one of an epitaxial source region and an epitaxial drain region on a source region portion and a drain region portion of the fin structure. At least one of the epitaxial source region portion and the epitaxial drain region portion include a first concentration doped portion adjacent to the fin structure, and a second concentration doped portion on the first concentration doped portion. The second concentration portion has a greater dopant concentration than the first concentration doped portion. An extension dopant region extending into the channel portion of the fin structure having an abrupt dopant concentration gradient of n-type or p-type dopants of 7 nm per decade or greater.

Abstract: A method patterns at least one pair of openings through a protective layer and into a substrate. The openings are positioned on opposite sides of a channel region of the substrate. The method forms sidewall spacers along the sidewalls of the openings and removes additional substrate material from the bottom of the openings. The material removal process creates an extended bottom within the openings. The method forms a first strain producing material within the extended bottom of the openings. The method removes the sidewall spacers and forms a second material within the remainder of the openings between the first strain producing material and the top of the openings. The method removes the protective layer and forms a gate dielectric and a gate conductor on the horizontal surface on the substrate adjacent the channel region. The second material comprises source and drain regions.

Abstract: A method patterns at least one pair of openings through a protective layer and into a substrate. The openings are positioned on opposite sides of a channel region of the substrate. The method forms sidewall spacers along the sidewalls of the openings and removes additional substrate material from the bottom of the openings. The material removal process creates an extended bottom within the openings. The method forms a first strain producing material within the extended bottom of the openings. The method removes the sidewall spacers and forms a second material within the remainder of the openings between the first strain producing material and the top of the openings. The method removes the protective layer and forms a gate dielectric and a gate conductor on the horizontal surface on the substrate adjacent the channel region. The second material comprises source and drain regions.