Abstract: Methods for in-die overlay reticle measurement and the resulting devices are disclosed. Embodiments include providing parallel structures in a first layer on a substrate; determining measurement sites, in a second layer above the first layer, void of active integrated circuit elements; forming overlay trenches, in the measurement sites and parallel to the structures, exposing sections of the structures, wherein each overlay trench is aligned over a structure and over spaces between the structure and adjacent structures; determining a trench center-of-gravity of an overlay trench; determining a structure center-of-gravity of a structure exposed in the overlay trench; and determining an overlay parameter based on a difference between the trench center-of-gravity and the structure center-of-gravity.

Abstract: An electrode support arm for arc furnaces which is constructed as a hollow section with a wall formed at least partially from current-carrying material of high conductivity. The wall of the hollow section has a coolant guiding system including ducts arranged in the wall so as to be parallel to one another and concentric to the center axis of the support arm. The quantity and dimensions of these ducts enable sufficient cooling without a reduction in the strength of the support arm.

Abstract: A metallurgical vessel (10) includes at least one metallic electrode (20) fastened thereto having a chamber within the vessel (10) for holding a melt (19) and having a bottom surface, a shell (14) abutting the bottom surface, and a flanged tube (31) arranged on the shell (14) with the flanged tube (31) having a flanged surface (32). The electrode (20) is disposed coaxially with respect to the flanged tube (31) and is formed by first and second bars (21, 22) connectable to one another. The first bar (21) has the top face positioned proximate to the bottom surface of the chamber and penetrates the vessel (10) for contact with the melt. The second bar (22) is positioned against the bottom face of the first bar (21) and extends out from the vessel (10), the first bar having a should region (23) positioned annularly thereabout adapted to contact and lean against the flanged surface (32) of the flanged tube (31).