Abstract: Sensor module has one or more sensor pairs with a first sensor and a second sensor, each having an electrode for a ground terminal and an electrode for a signal terminal. The sensor module has at least one ground line as well as a first signal line and a second signal line. The first signal line is connected to the signal terminal of the first sensor, the second signal line is connected to the signal terminal of the second sensor, and the ground line is connected to the ground terminals of the first and second sensors. The sensor module extends in a longitudinal direction L from a beginning to an end, and the ground line and the signal lines run from the beginning to the end of the sensor module without crossing each other.

Abstract: A piezoelectric sensor, comprising at least one first electrode, at least one second electrode, and a piezoelectric material, wherein the piezoelectric material has an anisotropic electromechanical coupling and the at least one first and second electrodes are at least in part embedded in the piezoelectric material, the piezoelectric material having a first surface wherein the electrodes extend vertically within the piezoelectric material from the first surface.

Abstract: A sensor device comprising at least a first substrate, a capacitive sensor for recording the approach of an object, a piezoelectric sensor for recording a pressure, wherein the capacitive sensor is arranged on a first side of the first substrate and the piezoelectric sensor is arranged on a second side of the first substrate, wherein the second side is opposite the first side, or wherein the capacitive sensor and the piezoelectric sensor are arranged on the same side of the substrate.

Abstract: A piezoelectric sensor, comprising at least one first electrode, at least one second electrode, and a piezoelectric material, wherein the piezoelectric material has an anisotropic electromechanical coupling and the at least one first and second electrodes are at least in part embedded in the piezoelectric material, the piezoelectric material having a first surface wherein the electrodes extend vertically within the piezoelectric material from the first surface.

Abstract: A sensor device comprising at least a first substrate, a capacitive sensor for recording the approach of an object, a piezoelectric sensor for recording a pressure, wherein the capacitive sensor is arranged on a first side of the first substrate and the piezoelectric sensor is arranged on a second side of the first substrate, wherein the second side is opposite the first side, or wherein the capacitive sensor and the piezoelectric sensor are arranged on the same side of the substrate.