Patents by Inventor Andreas Weickenmeier

Andreas Weickenmeier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle-optical lens arrangement and method employing such a lens arrangement
    Patent number: 6777166
    Abstract: The present invention discloses a lens arrangement for the particle-optical imaging of an object to be imaged and positionable in an object plane into an image area. In one embodiment, the lens arrangement includes a first focusing lens device for providing a field having a focusing effect on the imaging particles for imaging the object from the object area into an intermediate image area, a second focusing lens device for providing a further field having a focusing effect on the imaging particles for imaging the object, which has been imaged into the intermediate image area, into the image area, and a deflection lens device for providing a field having a deflecting effect on the imaging particles in a region of the intermediate image area. The deflection lens device is disposed in the intermediate image area primarily to compensate for aberrations, such as image field curvature.
    Type: Grant
    Filed: March 1, 2002
    Date of Patent: August 17, 2004
    Assignee: Carl Zeiss SMT AG
    Inventor: Andreas Weickenmeier
  • Particle-optical lens arrangement and method employing such a lens arrangement
    Publication number: 20020126366
    Abstract: A lens arrangement is proposed for the particle-optical imaging of an object (23), to be imaged and positionable in an object plane (27), into an image area (31), comprising
    Type: Application
    Filed: March 1, 2002
    Publication date: September 12, 2002
    Inventor: Andreas Weickenmeier