Abstract: A circuit includes a cross-talk compensation component including a power profile reconstruction component for reconstructing the power profile of a digital microphone coupled to a microelectromechanical (MEMS) device, wherein the power profile represents power consumption of the digital microphone over time between at least two operational modes of the digital microphone, and a reconstruction filter for modeling thermal and/or acoustic properties of the digital microphone; and a subtractor having a first input for receiving a signal from the digital microphone, a second input coupled to the cross-talk compensation component, and an output for providing a digital output signal.

Abstract: An adaptive MEMS device includes a MEMS microphone and integrated circuitry, wherein the integrated circuitry is electrically connected to the MEMS microphone. The integrated circuitry reads out an output signal from the MEMS microphone and provides the output signal or a rendered output signal, via a first integrated interface, to an external processing device. Additionally, the integrated circuitry determines, at run-time, diagnostic data on the current condition of the MEMS device and provides, at run-time, the diagnostic data, via a second integrated interface, to the external processing device.

Abstract: A system includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings, a sealed low pressure chamber between the first membrane and the third membrane, and a plurality of electrodes in the sealed low pressure chamber.

Abstract: In accordance with an embodiment, a circuit includes: a first super source follower; a compensation circuit having a compensating node configured to provide a voltage of opposite phase of a voltage of an internal node of the first super source follower; and a first compensation capacitor coupled between an input of the first super source follower and the compensating node of the compensation circuit.

Abstract: In accordance with an embodiment, A micro electro mechanical system (MEMS) device includes a cavity configured to contain a fluid; a pump configured to generate a pressure to the fluid in the cavity, wherein the pressure is configured to cause the fluid to be emitted from the cavity; a sensor configured to sense an electrical parameter based on an electrical impedance of the pump, and configured to provide a sensor signal based on the electrical parameter; and a controller configured to control an operation of the pump; wherein the controller is configured to process the sensor signal to adapt an operation of the MEMS device or for failure detection.

Abstract: An attenuator circuit includes a microelectromechanical system (MEMS) device having an output for providing an analog output voltage; a switch having a first controlled node coupled to an output of the MEMS device, a second controlled node for receiving a replica analog output voltage, and a control node for receiving a control signal; and a capacitor coupled to the switch.

Abstract: According to an embodiment, a digital microphone includes an analog-to-digital converter (ADC) for receiving an analog input signal; a DC blocker component coupled to the ADC; a digital low pass filter coupled to the DC block component; and a nonlinear compensation component coupled to the digital low pass filter for providing a digital output signal.

Abstract: A system includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings, a sealed low pressure chamber between the first membrane and the third membrane, and a plurality of electrodes in the sealed low pressure chamber.

Abstract: In accordance with an embodiment, a circuit includes a differential amplifier having inputs configured to be coupled to an output of a differential microelectromechanical systems (MEMS) device; a common mode coupling circuit coupled to an output of the differential amplifier; and an amplifier having an input coupled to an output of the common mode coupling circuit and an output configured to be AC coupled to a bias input node of the differential MEMS device.

Abstract: A microphone includes a first resistor circuit for receiving a bias voltage; an offset reduction circuit coupled to the first resistor circuit; a second resistor circuit coupled to the offset reduction circuit; an amplifier coupled to the second resistor circuit configured for receiving an input signal and generating an output signal; and a capacitor circuit coupled to the amplifier, the offset reduction circuit, and the second resistor circuit.

Abstract: A device includes a readout circuit coupled between an input node and an output node; a microelectromechanical systems (MEMS) device coupled to the input node; and a first charge controlled clamp circuit coupled between the input node and a first bias node.

Abstract: A method for manufacturing a MEMS pressure transducer chip with a hybrid integrated environmental barrier structure includes a step of providing a substrate comprising at least one membrane, a step of structuring a stepped recess structure into the substrate, the stepped recess structure comprising a first recess having a first lateral width and an adjacent second recess having a larger second lateral width, where the stepped recess structure extends between the membrane and a substrate surface opposite to the membrane, and a step of arranging an environmental barrier structure inside the second recess.

Abstract: A triple-membrane MEMS device includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, a sealed low pressure chamber between the first membrane and the third membrane, a first stator and a second stator in the sealed low pressure chamber, and a signal processing circuit configured to read-out output signals of the triple-membrane MEMS device.

Abstract: In accordance with an embodiment, a circuit includes: a first super source follower; a compensation circuit having a compensating node configured to provide a voltage of opposite phase of a voltage of an internal node of the first super source follower; and a first compensation capacitor coupled between an input of the first super source follower and the compensating node of the compensation circuit.

Abstract: An analog-to-digital converter (ADC) includes a first controlled oscillator (CO) for generating at least one phase signal, and wherein the at least one phase signal generates a first output signal of the ADC; and at least one first frequency-controlled resistor (FDR) for receiving the at least one phase signal generated by the first CO, wherein the first CO and the at least one first FDR are coupled together at a first subtraction node of the ADC, and wherein the first subtraction node receives a first input signal.

Abstract: A system includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings, a sealed low pressure chamber between the first membrane and the third membrane, and a plurality of electrodes in the sealed low pressure chamber

Abstract: A single-ended to differential converter includes a converter input, a first converter output, a second converter output, and an internal node, wherein the first converter output and the second converter output comprise a differential output; a non-inverting amplifier having an input coupled to the converter input, and an output coupled to the first converter output; an inverting amplifier having an input coupled to the first converter output, and an output coupled to the second converter output; a charge pump having a charge pump output capacitor coupled between the second converter output and the internal node; and a feedback capacitor coupled between the first converter output and the internal node.

Abstract: A triple-membrane MEMS device includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, a sealed low pressure chamber between the first membrane and the third membrane, a first stator and a second stator in the sealed low pressure chamber, and a signal processing circuit configured to read-out output signals of the triple-membrane MEMS device.

Abstract: A circuit includes a cross-talk compensation component including a power profile reconstruction component for reconstructing the power profile of a digital microphone coupled to a microelectromechanical (MEMS) device, wherein the power profile represents power consumption of the digital microphone over time between at least two operational modes of the digital microphone, and a reconstruction filter for modeling thermal and/or acoustic properties of the digital microphone; and a subtractor having a first input for receiving a signal from the digital microphone, a second input coupled to the cross-talk compensation component, and an output for providing a digital output signal.

Abstract: In accordance with an embodiment, a circuit includes: a first super source follower; a compensation circuit having a compensating node configured to provide a voltage of opposite phase of a voltage of an internal node of the first super source follower; and a first compensation capacitor coupled between an input of the first super source follower and the compensating node of the compensation circuit.