Abstract: Semiconductor products, especially semiconductor wafers, are processed according to a defined sequence of orders with the products arranged in a container. Product processing data of product processing steps are stored with reference to product position data identifying product positions in the product containers. When the position of products in a container is required, a product handling order is defined and integrated in the predefined sequence of orders thereby resulting in an extended sequence of orders. The product processing steps and the product handling step are executed in compliance with the extended sequence of orders and product position change data are stored. All slot-related semiconductor processing information are thereby automatically brought in conformity with the actual material flow in cases where handling steps are executed that change the semiconductor positions upon irregular processing execution.

Abstract: The present invention relates to a method and a system for operating a semiconductor factory. The factory comprises equipment (8) for processing semiconductor wafers, and an automated material handling system (12). The invention comprises clamping a wafer carrier (16) while a wafer is processed by a particular tool (10), continuing clamping the wafer carrier (16) after processing, and unclamping the wafer carrier (16) when the automated material handling system (12) is ready for removing the wafer carrier (16) from the tool (10).

Abstract: Semiconductor products, especially semiconductor wafers, are processed according to a defined sequence of orders with the products arranged in a container. Product processing data of product processing steps are stored with reference to product position data identifying product positions in the product containers. When the position of products in a container is required, a product handling order is defined and integrated in the predefined sequence of orders thereby resulting in an extended sequence of orders. The product processing steps and the product handling step are executed in compliance with the extended sequence of orders and product position change data are stored. All slot-related semiconductor processing information are thereby automatically brought in conformity with the actual material flow in cases where handling steps are executed that change the semiconductor positions upon irregular processing execution.