Patents by Inventor Andrei I. Bunenko

Andrei I. Bunenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of treating semiconductor materials
    Patent number: 5395794
    Abstract: A method for treatment of semiconductor material wherein the material is exposed to electromagnetic radiation having a frequency in the range of the resonance frequency in order to alter the relative positions of interstitial impurity ions and lattice nodes of the interstitial ions. The intensity of the electric field is selected to be proportional to the value of activation barrier potential of the impurity ions. The method is useful in providing accelerated diffusion of a doping impurity, activation of the ions of an implanted impurity, or in creation of metallic ohmic contacts at the surface of the semiconductor material without heating of the semiconductor material.
    Type: Grant
    Filed: April 22, 1993
    Date of Patent: March 7, 1995
    Inventors: Vladislav E. Sklyarevich, Mikhail V. Shevelev, Vyacheslav I. Guroshev, Andrei I. Bunenko