Patents by Inventor ANDREI KHOMENKO

ANDREI KHOMENKO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ION PROBE WITH COUPLING TO PLASMA
    Publication number: 20250079114
    Abstract: Embodiments include a plasma processing apparatus including a chamber with an inner chamber wall. A workpiece support is within the inner chamber wall, the workpiece support for supporting a workpiece in a processing region of the chamber. An ion probe extends through the chamber and inner chamber wall and into a plasma region above the workpiece.
    Type: Application
    Filed: August 2, 2024
    Publication date: March 6, 2025
    Inventors: ANDREI KHOMENKO, LEONID DORF, EVGENY KAMENETSKIY, VIACHESLAV PLOTNIKOV, RAJINDER DHINDSA