Patents by Inventor Andrei Mihaila
Andrei Mihaila has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250006785Abstract: A power semiconductor device (10) comprises a semiconductor body (11) which includes a first main surface (12) and a second main surface (13), a gate insulator (14) arranged at the first main surface (12), and a gate electrode (15) separated from the semiconductor body (11) by the gate insulator (14). The semiconductor body (11) comprises a drift layer (16) of a first conductivity type, a well layer (27) of a second conductivity type being different from the first conductivity type and forming a first junction (18) to the drift layer (16), a source region (20) of the first conductivity type forming a second junction (21) to the well layer (27), and an island region (30) of the second conductivity type attaching the source region (20) such that the source region (20) separates the island region (30) from the well layer (27) in at least 50% of an island surface area of the island region (30) in the semiconductor body (11).Type: ApplicationFiled: June 9, 2022Publication date: January 2, 2025Inventors: Gianpaolo ROMANO, Andrei MIHAILA, Marco BELLINI, Yulieth ARANGO, Lars KNOLL, Nazareno DONATO, Florin UDREA
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Publication number: 20240240357Abstract: A method for producing a silicon carbide substrate (11) comprises providing the silicon carbide substrate (11) and irradiating the silicon carbide substrate (11) with particles (14) out of a group comprising electrons, hydrogen atoms, helium atoms, lithium atoms, beryllium atoms, boron atoms, sodium atoms, magnesium atoms and aluminum atoms. An energy of the particles (14) for irradiation is selected such that a resistivity (p) is increased by the irradiation at least in a part of the silicon carbide substrate (11) and the silicon carbide substrate (11) is semiconducting after irradiation.Type: ApplicationFiled: March 10, 2022Publication date: July 18, 2024Inventors: Giovanni ALFIERI, Andrei MIHAILA
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Publication number: 20240186377Abstract: One embodiment provides a power semiconductor device that includes a semiconductor body. A source region of a first conductivity type is disposed at a top side the semiconductor body. A channel region of a second conductivity type is disposed in the semiconductor body below the source region and a drift region of the first conductivity type is disposed in the semiconductor body below the channel region. A trench extends from the top side through the source region and through the channel region and ending in the drift region. As seen in a top view of the top side, the trench comprises a plurality of branch-offs. A gate electrode is disposed within the trench and a shield region of the second conductivity type is located at least partially below a branch-off of the trench.Type: ApplicationFiled: March 22, 2022Publication date: June 6, 2024Inventors: Yulieth Arango, Gianpaolo Romano, Andrei Mihaila, Marco Bellini, Lars Knoll
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Publication number: 20240170566Abstract: A power semiconductor device (1) is provided, comprising a drift layer (2) of a first conductivity type, at least two well regions (3) of a second conductivity type being different from the first conductivity type, and at least one intermediate region (4), wherein the at least two well regions (3) and the at least one intermediate region (4) are provided within the drift layer (2) at a first side, the at least one intermediate region (4) is provided between the at least two well regions (3), and the at least one intermediate region (4) comprises at least one first doped region (5) of the first conductivity type and at least one second doped region (6) of the second conductivity type.Type: ApplicationFiled: February 18, 2022Publication date: May 23, 2024Inventors: Andrei MIHAILA, Munaf RAHIMO, Lars KNOLL, Marco BELLINI
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Patent number: 11967616Abstract: Disclosed is a vertical silicon carbide power MOSFET with a 4H-SiC substrate of n+-type as drain and a 4H-Si C epilayer of n?-type, epitaxially grown on the 4H-SiC substrate acting as drift region and a source region of p++-type, a well region of p-type, a channel region of p-type and a contact region of n++-type implanted into the drift region and a metal gate insulated from the source and drift region by a gate-oxide. A high mobility layer with a vertical thickness in a range 0.1 nm to 50 nm exemplarily in the range of 0.5 nm to 10 nm is provided at the interface between the 4H-SiC epilayer and the gate-oxide.Type: GrantFiled: October 22, 2019Date of Patent: April 23, 2024Assignee: Hitachi Energy LtdInventors: Stephan Wirths, Andrei Mihaila, Lars Knoll
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Patent number: 11888037Abstract: A power semiconductor device includes a wide-bandgap semiconductor layer having an active region and a termination region that laterally surrounds the active region. The wide-bandgap semiconductor layer has a first recess that is recessed from the first main side in the termination region and surrounds the active region and a second recess that is recessed from the first main side in the active region and is filled with an insulating material. A depth of the second recess is the same as a depth of the first recess. A field plate on the first main side of the wide-bandgap semiconductor layer exposes a first portion of the wide-bandgap semiconductor layer in the termination region.Type: GrantFiled: March 5, 2019Date of Patent: January 30, 2024Assignee: Hitachi Energy LtdInventors: Andrei Mihaila, Lars Knoll, Lukas Kranz
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Publication number: 20230411514Abstract: In at least one embodiment, the power semiconductor device 1) involves a semiconductor body (2), at least one source region (21) in the semiconductor body (2), a gate electrode (3) at the semiconductor body (2), a gate insulator (4, 41, 42) between the semiconductor body (2) and the gate electrode (3), and at least one well region (22) at the at least one source region (21) and at the gate insulator (4, 41, 42), wherein the gate insulator (4, 41, 42) has a varying dielectric capacitance, the dielectric capacitance is in each case a quotient of a dielectric constant and of a geometric thickness of the gate insulator (4, 41, 42) at a specific location thereof, and the dielectric capacitance is larger at the at least one well region (22) than in remaining regions of the gate insulator (4, 42).Type: ApplicationFiled: August 30, 2023Publication date: December 21, 2023Inventors: Gianpaolo ROMANO, Lars KNOLL, Yulieth ARANGO, Stephan WIRTHS, Andrei MIHAILA
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Publication number: 20230187525Abstract: An insulated gate structure includes a wide bandgap material layer having a channel region of a first conductivity type. A gate insulating layer is arranged directly on the channel region and has a first nitride layer that is arranged directly on the channel region. The gate insulating layer has a concentration of carbon atoms that is less than 1018 atoms/cm?3 at a distance of 3 nm from an interface between the wide bandgap material layer and the first nitride layer. An electrically conductive gate electrode layer overlies the gate insulating layer so that the gate electrode layer is separated from the wide bandgap material layer by the gate insulating layer.Type: ApplicationFiled: February 25, 2021Publication date: June 15, 2023Inventors: Lars Knoll, Stephan Wirths, Andrei Mihaila
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Publication number: 20220028976Abstract: Disclosed is a vertical silicon carbide power MOSFET with a 4H-SiC substrate of n+-type as drain and a 4H-Si C epilayer of n?-type, epitaxially grown on the 4H-SiC substrate acting as drift region and a source region of p++-type, a well region of p-type, a channel region of p-type and a contact region of n++-type implanted into the drift region and a metal gate insulated from the source and drift region by a gate-oxide. A high mobility layer with a vertical thickness in a range 0.1 nm to 50 nm exemplarily in the range of 0.5 nm to 10 nm is provided at the interface between the 4H-SiC epilayer and the gate-oxide.Type: ApplicationFiled: October 22, 2019Publication date: January 27, 2022Inventors: Stephan Wirths, Andrei Mihaila, Lars Knoll
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Publication number: 20210020753Abstract: A power semiconductor device includes a wide-bandgap semiconductor layer having an active region and a termination region that laterally surrounds the active region. The wide-bandgap semiconductor layer has a first recess that is recessed from the first main side in the termination region and surrounds the active region and a second recess that is recessed from the first main side in the active region and is filled with an insulating material. A depth of the second recess is the same as a depth of the first recess. A field plate on the first main side of the wide-bandgap semiconductor layer exposes a first portion of the wide-bandgap semiconductor layer in the termination region.Type: ApplicationFiled: March 5, 2019Publication date: January 21, 2021Inventors: Andrei Mihaila, Lars Knoll, Lukas Kranz
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Patent number: 10553437Abstract: A method of manufacturing a semiconductor device is provided with: (a) providing a wide bandgap substrate product, (b) forming source regions by applying a first mask with a first and second mask layer and applying an n dopant, forming a well layer by removing such part of the first mask, which is arranged between the two source regions, and applying a p dopant, forming two channel regions by forming a third mask by performing an etching step, by which the first mask layer is farther removed at the openings than the second mask layer, and then removing the second mask layer, wherein the remaining first mask layer forms a third mask and applying a p dopant, wherein a well layer depth is at least as large as a channel layer depth, (c) after step (b) for forming a plug applying a fourth mask, which covers the source regions and the channel layers and applying a p fourth dopant to a greater depth than the well layer depth and with a higher doping concentration than the well layers.Type: GrantFiled: June 4, 2018Date of Patent: February 4, 2020Assignee: ABB Schweiz AGInventors: Holger Bartolf, Munaf Rahimo, Lars Knoll, Andrei Mihaila, Renato Minamisawa
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Patent number: 10516022Abstract: A wide bandgap semiconductor device is comprising an (n?) doped drift layer between a first main side and a second main side. On the first main side, n doped source regions are arranged which are laterally surrounded by p doped channel layers having a channel layer depth. P+ doped well layers having a well layer depth, which is at least as large as the channel layer depth is arranged at the bottom of the source regions. A p++ doped plug extends from a depth, which is at least as deep as the source layer depth and less deep than the well layer depth, to a plug depth, which is as least as deep as the well layer depth, and having a higher doping concentration than the well layers, is arranged between the source regions and well layers. On the first main side, an ohmic contact contacts as a first main electrode the source regions, the well layers and the plug.Type: GrantFiled: June 4, 2018Date of Patent: December 24, 2019Assignee: ABB Schweiz AGInventors: Holger Bartolf, Munaf Rahimo, Lars Knoll, Andrei Mihaila, Renato Minamisawa
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Patent number: 10361082Abstract: A method of manufacturing a semiconductor device is provided with: (a) providing a wide bandgap substrate product, (b) for forming two channel layers applying a first mask and applying a p first dopant, for forming two source regions forming a second mask by applying a further layer on the lateral sides of the first mask and applying an n second dopant, for forming two well layers forming a third mask by removing such part of the second mask between the source regions and applying a p third dopant, wherein a well layer depth is at least as large as a channel layer depth, (c) after step (b) for forming a plug applying a fourth mask, which covers the source regions and the channel layers and applying a p fourth dopant to a greater depth than the well layer depth and with a higher doping concentration than the well layers; wherein the well layers surround the plug in the lateral direction and separate it from the two source regions.Type: GrantFiled: June 4, 2018Date of Patent: July 23, 2019Assignee: ABB Schweiz AGInventors: Holger Bartolf, Munaf Rahimo, Lars Knoll, Andrei Mihaila, Renato Minamisawa
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Patent number: 10346415Abstract: A computer-implemented method can include identifying one or more candidate topics from a query. The method can generate, for each candidate topic, a candidate topic-answer pair that includes both the candidate topic and an answer to the query for the candidate topic. The method can obtain search results based on the query, wherein one or more of the search results references an annotated resource. For each candidate topic-answer pair, the method can determine a score for the candidate topic-answer pair for use in determining a response to the query, based on (i) an occurrence of the candidate topic in the annotations of the resources referenced by one or more of the search results, and (ii) an occurrence of the answer in annotations of the resources referenced by the one or more search results, or in the resources referenced by the one or more search results.Type: GrantFiled: April 1, 2016Date of Patent: July 9, 2019Assignee: Google Inc.Inventors: David Smith, Engin Cinar Sahin, George Andrei Mihaila
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Patent number: 10164126Abstract: A semiconductor power rectifier with increased surge current capability is described. A semiconductor layer includes a drift layer having a first conductivity type, at least one pilot region having a second conductivity type different from the first conductivity type, a plurality of stripe-shaped emitter regions having the second conductivity type, and a transition region having the second conductivity type, wherein the at least one pilot region has in any lateral direction parallel to the first main side a width of at least 200 ?m and is formed adjacent to the first main side to form a first p-n junction with the drift layer, each emitter region is formed adjacent to the first main side form a second p-n junction with the drift layer, and the transition region is formed adjacent to the first main side to form a third p-n junction with the drift layer.Type: GrantFiled: January 3, 2018Date of Patent: December 25, 2018Assignee: ABB Schweiz AGInventors: Andrei Mihaila, Munaf Rahimo, Renato Minamisawa, Lars Knoll, Liutauras Storasta
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Publication number: 20180350602Abstract: A method of manufacturing a semiconductor device is provided with: (a) providing a wide bandgap substrate product, (b) forming source regions by applying a first mask with a first and second mask layer and applying an n dopant, forming a well layer by removing such part of the first mask, which is arranged between the two source regions, and applying a p dopant, forming two channel regions by forming a third mask by performing an etching step, by which the first mask layer is farther removed at the openings than the second mask layer, and then removing the second mask layer, wherein the remaining first mask layer forms a third mask and applying a p dopant, wherein a well layer depth is at least as large as a channel layer depth, (c) after step (b) for forming a plug applying a fourth mask, which covers the source regions and the channel layers and applying a p fourth dopant to a greater depth than the well layer depth and with a higher doping concentration than the well layers.Type: ApplicationFiled: June 4, 2018Publication date: December 6, 2018Inventors: Holger Bartolf, Munaf Rahimo, Lars Knoll, Andrei Mihaila, Renato Minamisawa
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Publication number: 20180350943Abstract: A wide bandgap semiconductor device is comprising an (n?) doped drift layer between a first main side and a second main side. On the first main side, n doped source regions are arranged which are laterally surrounded by p doped channel layers having a channel layer depth. P+ doped well layers having a well layer depth, which is at least as large as the channel layer depth is arranged at the bottom of the source regions. A p++ doped plug extends from a depth, which is at least as deep as the source layer depth and less deep than the well layer depth, to a plug depth, which is as least as deep as the well layer depth, and having a higher doping concentration than the well layers, is arranged between the source regions and well layers. On the first main side, an ohmic contact contacts as a first main electrode the source regions, the well layers and the plug.Type: ApplicationFiled: June 4, 2018Publication date: December 6, 2018Inventors: Holger Bartolf, Munaf Rahimo, Lars Knoll, Andrei Mihaila, Renato Minamisawa
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Patent number: 10121909Abstract: It is the object of the invention to provide a power semiconductor rectifier with a low on-state-voltage and high blocking capability. The object is attained by a power semiconductor rectifier comprising: a drift layer having a first conductivity type; and an electrode layer forming a Schottky contact with the drift layer, wherein the drift layer includes a base layer having a peak net doping concentration, below 1·1016 cm?3 and a barrier modulation layer which is in direct contact with the electrode layer to form at least a part of the Schottky contact, wherein a net doping concentration of the barrier modulation layer is in a range between 1·1016cm?3 and 1·1019 cm?3 and wherein the barrier modulation layer has a layer thickness in a direction vertical to the interface between the electrode layer and the barrier modulation, layer of at least 1 nm and less than 0.2 ?m.Type: GrantFiled: March 10, 2016Date of Patent: November 6, 2018Assignee: ABB Schweiz AGInventors: Renato Minamisawa, Andrei Mihaila, Vinoth Sundaramoorthy
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Publication number: 20180286963Abstract: A method of manufacturing a semiconductor device is provided with: (a) providing a wide bandgap substrate product, (b) for forming two channel layers applying a first mask and applying a p first dopant, for forming two source regions forming a second mask by applying a further layer on the lateral sides of the first mask and applying an n second dopant, for forming two well layers forming a third mask by removing such part of the second mask between the source regions and applying a p third dopant, wherein a well layer depth is at least as large as a channel layer depth, (c) after step (b) for forming a plug applying a fourth mask, which covers the source regions and the channel layers and applying a p fourth dopant to a greater depth than the well layer depth and with a higher doping concentration than the well layers; wherein the well layers surround the plug in the lateral direction and separate it from the two source regions.Type: ApplicationFiled: June 4, 2018Publication date: October 4, 2018Inventors: Holger Bartolf, Munaf Rahimo, Lars Knoll, Andrei Mihaila, Renato Minamisawa
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Publication number: 20180212071Abstract: A semiconductor power rectifier with increased surge current capability is described, which has a semiconductor layer having a first main side and a second main side opposite to the first main side. The semiconductor layer includes a drift layer having a first conductivity type, at least one pilot region having a second conductivity type different from the first conductivity type, a plurality of stripe-shaped emitter regions having the second conductivity type, and a transition region having the second conductivity type, wherein the at least one pilot region has in any lateral direction parallel to the first main side a width of at least 200 ?m and is formed adjacent to the first main side to form a first p-n junction with the drift layer, each emitter region is formed adjacent to the first main side form a second p-n junction with the drift layer, and the transition region is formed adjacent to the first main side to form a third p-n junction with the drift layer.Type: ApplicationFiled: January 3, 2018Publication date: July 26, 2018Inventors: Andrei Mihaila, Munaf Rahimo, Renato Minamisawa, Lars Knoll, Liutauras Storasta