Abstract: A plasma generation system that is capable of generating uniform high-density plasma includes a microwave generator for generating microwaves, a refractor for altering a direction of propagation of the microwaves, and an electromagnetic unit for applying a magnetic field to plasma formed by the microwaves to generate electron cyclotron resonance (ECR).

Abstract: An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis direction transformation. A frame supports the platform around the platform. An X-axis actuator connects the frame to the platform in an X-axis or Y-axis direction perpendicular to the Z-axis, and moves the object in the X-axis direction by transformation in the direction perpendicular to the Z-axis.

Abstract: A nanoscale digital data storage device is provided. In the nanoscale digital data storage device, a storage medium has a polymer layer deposited on a substrate, for writing and reading digital data on and from. A cantilever chip has a plurality of cantilevers arranged therein. Each cantilever is fixed to another substrate at one end and has a tip formed at its free end, for emitting heat according to an applied current. The tips in the cantilever chip are in contact with the storage medium at predetermined bit positions during data writing, and the cantilever chip applies a relatively low current to a tip when the tip writes bit 1 and a relatively high current to the tip when the tip writes bit 0.

Abstract: A plasma generation system that is capable of generating uniform high-density plasma includes a microwave generator for generating microwaves, a refractor for altering a direction of propagation of the microwaves, and an electromagnetic unit for applying a magnetic field to plasma formed by the microwaves to generate electron cyclotron resonance (ECR).