Patents by Inventor Andrei Yakunin

Andrei Yakunin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
    Publication number: 20120147350
    Abstract: A transmissive spectral purity filter configured to transmit extreme ultraviolet radiation includes a filter part having a plurality of apertures to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. The apertures may be manufactured in semiconductor material such as silicon by an anisotropic etching process. The semiconductor material is provided with a hydrogen-resistant layer, such as silicon nitride Si3N4, silicon dioxide SiO2, or silicon carbide SiC.
    Type: Application
    Filed: May 11, 2010
    Publication date: June 14, 2012
    Applicant: ASML NETHERLANDS B.V
    Inventors: Andrei Yakunin, Vadim Banine, Denis Glushkov