Patents by Inventor Andreja Kontic

Andreja Kontic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Qualitative method for troubleshooting a dielectric tool
    Patent number: 6645782
    Abstract: According to one embodiment of the present invention, a method for determining the location of contaminants on a semiconductor wafer comprises obtaining a first particle count of the wafer, scrubbing the wafer, obtaining a second particle count of the wafer after scrubbing the wafer, and determining the location of the particles based on the first and second particle counts. According to another embodiment of the present invention, a method for determining the source of particle contaminants in a semiconductor processing tool comprises the steps of obtaining a first particle count of a wafer with at least one film deposited thereon, scrubbing the wafer, obtaining a second particle count of the wafer after scrubbing the wafer, and localizing areas of the processing tool where the particle contamination originates from.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: November 11, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Andreja Kontic