Abstract: An improved vacuum system for a system for accurately tracing on an electron sensitive film with an electron beam which passes through three (3) adjacent vacuum stages and where each stage has a predetermined vacuum level is disclosed herein. The vacuum system is a high performance, fully automatic, three (3) stage, differentially pumped system. Two (2) stages of the system each use a diffusion pump as a first pump means. The diffusion pump of the second stage is backed by a single direct drive mechanical pump and also acts as the backing pump for the diffusion pump of the first stage. The third stage uses a single direct drive mechanical pump for vacuum pumping its chamber.

Abstract: A method and apparatus are described for improving the geometric fidelity of images reproduced in a charged particle beam device. The beam is deflected across a sensitive medium to form a test image of predetermined configuration. The test image is compared with a reference image and geometric deviations measured, at a number of points, are used to calculate correction signals required to modify the beam deflection to offset the deviations. Circuit adjustments are then made to provide the calculated correction signals. The correction signal adjustments are accomplished in separate non-interactive circuits for each of a plurality of predetermined corrections which only require a one time adjustment.

Abstract: An improved particle beam recorder system is provided having a film gate which includes a referencing means for providing at least two differently shaped registration holes in a recording film substrate. The referencing means lock in, secure, and define the film position relative to a film receiving surface of a film gate during exposure imaging and thereby establish a defined relation between the image field and the film substrate and more particularly the registration holes thereof. The developed film image can thereafter be positioned in a predefined or desired relationship in a display means by aligning the registration holes of the film with suitable pegs of the display means. The registration holes also advantageously permit the images of exposed and developed films to be aligned relative to one another to permit accurate superimposition.The referencing means for producing the registration holes can be punch means which pierce the film.

Abstract: An improved particle beam recorder system having a pressure equalizing film gate including a platen for receiving a film thereon in pressure relieved relation to avoid trapping distortion causing air between the film and the platen. The platen can provide a curved film receiving surface and a predetermined tension can be applied to the recording film disposed on the platen to assure positive contact between the film and the platen. A motor driven film advance system is provided to intermittently advance the film through the film gate to thereby intermittently provide fresh and stationary film for exposure and image recording. A particle beam generator is disposed in predetermined relation with the film and the film gate and the recording beam produced thereby is electronically positionally corrected for the known geometric distortions introduced by a predetermined continuous curvature of the film gate and the predetermined tensioning of the film to produce accurate imaging on the film.

Abstract: A charged particle beam recorder having a curved film gate to impart a predetermined continuous curvature to the recording film. Predetermined tension is applied to the recording film to assure good contact of the film with the curved film gate and a motor is provided to intermittently advance the film through the film gate thereby providing fresh film for exposure. The positioning of the recording beam on the film is electronically corrected for the known geometric distortions introduced by the predetermined continuous curvature of the film gate and the predetermined tension of the film.