Abstract: Dynamic offset determination for each of a plurality of measurement systems for matching the systems is disclosed. One embodiment uses an artifact which is periodically run across the measurement system to be matched. Inputs for each run include the current offsets and historical data for the entire fleet and the new test measurement for the current measurement system under test. Evaluation based on exponentially weighted moving average and median calculation techniques may result in a new, reset offset for one or more measurement systems. The reset offset(s) is then applied to product measurements to nullify any tool matching issues.

Abstract: A method, system and computer program product for determining matching of a tool set in a production process are disclosed. According to an embodiment, a method for determining matching of a tool set in a production process comprises: selecting a measurement step within the production process, a subset of tools of the tool set being used in the measurement step; collecting production data for each tool of the subset, the production data being related to a process feeder tool; generating a weighted average of the production data for each tool of the subset; and analyzing weighted averages of all tools of the subset using a matching standard to determine matching of the subset.

Abstract: Dynamic offset determination for each of a plurality of measurement systems for matching the systems is disclosed. One embodiment uses an artifact which is periodically run across the measurement system to be matched. Inputs for each run include the current offsets and historical data for the entire fleet and the new test measurement for the current measurement system under test. Evaluation based on exponentially weighted moving average and median calculation techniques may result in a new, reset offset for one or more measurement systems. The reset offset(s) is then applied to product measurements to nullify any tool matching issues.