Patents by Inventor Andrew C. Sherman

Andrew C. Sherman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chamber components with increased pyrometry visibility
    Patent number: 7921803
    Abstract: The present invention generally provides method and apparatus for non-contact temperature measurement in a semiconductor processing chamber. Particularly, the present invention provides methods and apparatus for non-contact temperature measurement for temperature below 500° C. One embodiment of the present invention provides an apparatus for processing semiconductor substrates. The apparatus comprises a target component comprises a material with higher emissivity than the one or more substrates.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: April 12, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Yudovsky, Brendan McDougall, Ravi Jallepally, Yi-Chiau Huang, Maitreyee Mahajani, Kevin Griffin, Andrew C. Sherman
  • CHAMBER COMPONENTS WITH INCREASED PYROMETRY VISIBILITY
    Publication number: 20090078198
    Abstract: The present invention generally provides method and apparatus for non-contact temperature measurement in a semiconductor processing chamber. Particularly, the present invention provides methods and apparatus for non-contact temperature measurement for temperature below 500° C. One embodiment of the present invention provides an apparatus for processing semiconductor substrates. The apparatus comprises a target component comprises a material with higher emissivity than the one or more substrates.
    Type: Application
    Filed: September 21, 2007
    Publication date: March 26, 2009
    Inventors: JOSEPH YUDOVSKY, Brendan McDougall, Ravi Jallepally, Yi-Chiau Huang, Maitreyee Mahajani, Kevin Griffin, Andrew C. Sherman