Abstract: An organic layer capable of forming surface areas having an adsorption property different from that of a periphery due to the chemical change of a surface functional group is formed on a board. The surface of the organic layer is patterned and oxidized by a scanning probe microscope to form an array pattern in which small sections for adsorbing nanoparticles are arranged. Then, nanoparticle dispersed solution is applied to the organic layer having the array pattern or the organic layer is dipped in the nanoparticle dispersed solution to form a particle layer on the organic layer. At this time, the nanoparticles in the nanoparticle dispersed solution are respectively fixed only onto the small sections. Therefore, a nanoparticle array on which groups of nanoparticles are arranged in an array can be obtained. Thus, the nanoparticle array on which the groups of the nanoscale particles are arranged on the board is efficiently formed.