Abstract: A vacuum chamber module and an apparatus are disclosed. The vacuum chamber module comprises: a pump wall defining a recess shaped to receive a multi-stage vacuum pump; a plurality of vacuum chambers, each vacuum chamber being configured to be pumped by a respective stage of the multi-stage vacuum pump, each vacuum chamber being defined at least partially by a portion of the pump wall, each vacuum chamber having an pumping port located at a different circumferential position on the pump wall for fluid communication with the respective stage of the multi-stage vacuum pump. In this way, a module is provided which shares components, with the multi-stage pump at least partially accommodated within space otherwise occupied by the vacuum chambers and with the vacuum chambers located around the pump wall, which provides for a simpler and more compact arrangement.

Abstract: Oil feed nut for providing a lubricant to a bearing of a vacuum pump comprising a first end and an opposite second end and being configured to be connected to a shaft of the vacuum pump. Further, the oil feed nut comprising an oil feeding element extending between the first end and the second end, wherein the oil feeding element has an increasing diameter towards the second end to create an increasing rotational force acting on the lubricant in order to convey the lubricant towards the second end, and a bearing journal element having a cylindrical surface configured to be received in a back-up bearing of the vacuum pump. Therein, the back-up bearing is arranged in a cartridge of an oil reservoir.

Abstract: A vacuum chamber module and an apparatus are disclosed. The vacuum chamber module comprises: a pump wall defining a recess shaped to receive a multi-stage vacuum pump; a plurality of vacuum chambers, each vacuum chamber being configured to be pumped by a respective stage of the multi-stage vacuum pump, each vacuum chamber being defined at least partially by a portion of the pump wall, each vacuum chamber having an pumping port located at a different circumferential position on the pump wall for fluid communication with the respective stage of the multi-stage vacuum pump. In this way, a module is provided which shares components, with the multi-stage pump at least partially accommodated within space otherwise occupied by the vacuum chambers and with the vacuum chambers located around the pump wall, which provides for a simpler and more compact arrangement.

Abstract: A multiple stage turbomolecular pump is disclosed. The pump comprises: a higher vacuum stage comprising a plurality of rotor blade rows; a lower vacuum stage comprising a plurality of rotor blade rows of a larger diameter than the rotor blade rows of the higher vacuum stage; an inter-stage inlet for inputting gas into the turbomolecular pump between the higher vacuum and lower vacuum stages the inlet extending from an outer circumference of the pump to a radial position inside of the larger diameter and comprising a gas directing formation for directing the gas for entry into the pump in an axial direction.

Abstract: A vacuum system securing device to releasably secure a sealed connection between a first part and a second part of a vacuum system has a shaft having a longitudinal axis and is provided with a plurality of force applying members. The shaft is to be attached to the first part of the vacuum system to define a gap between the first part and the force applying members to receive the second part by a movement of the second part in a lengthways direction of the shaft. The shaft is movable relative to the first part to cause the force applying members to narrow the gap to apply a force pressing the second part towards the first part.

Abstract: An improved split flow vacuum pump is provided with at least two of compound pumps housed in a common housing comprising first, second, third and fourth inlets for receiving gas from a respective first to fourth chamber; said pumps are arranged such that their rotational axis are angled relative to each other in the housing, preferably perpendicular to each other.

Abstract: A vacuum system securing device to releasably secure a sealed connection between a first part and a second part of a vacuum system has a shaft having a longitudinal axis and is provided with a plurality of force applying members. The shaft is to be attached to the first part of the vacuum system to define a gap between the first part and the force applying members to receive the second part by a movement of the second part in a lengthways direction of the shaft. The shaft is movable relative to the first part to cause the force applying members to narrow the gap to apply a force pressing the second part towards the first part.