Patents by Inventor Andrew E. Hooper

Andrew E. Hooper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CLOSED-LOOP SILICON ETCHING CONTROL METHOD AND SYSTEM
    Publication number: 20120158169
    Abstract: A closed-loop etching control system controls exposure of a silicon workpiece to a spontaneous etchant. The system determines an amount of material to be removed from the silicon workpiece, based on metrology information corresponding to the silicon workpiece. The mass of the material to be removed is calculated, and the silicon workpiece is exposed to the spontaneous etchant to remove the material. The system monitors a change in mass of the silicon workpiece caused by exposure of the silicon workpiece to the spontaneous etchant to determine when the amount of the material has been removed from the silicon workpiece. Exposure of the silicon workpiece to the spontaneous etchant is stopped when the change in the mass of the silicon workpiece indicates that the amount of the material has been removed.
    Type: Application
    Filed: December 16, 2010
    Publication date: June 21, 2012
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Daragh S. Finn, Andrew E. Hooper, A. Grey Lerner