Patents by Inventor Andrew E. Lutz

Andrew E. Lutz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sealable stagnation flow geometries for the uniform deposition of materials and heat
    Patent number: 6242049
    Abstract: The present invention employs a constrained stagnation flow geometry apparatus to achieve the uniform deposition of materials or heat. The present invention maximizes uniform fluxes of reactant gases to flat surfaces while minimizing the use of reagents and finite dimension edge effects. This results, among other things, in large area continuous films that are uniform in thickness, composition and structure which is important in chemical vapor deposition processes such as would be used for the fabrication of semiconductors.
    Type: Grant
    Filed: September 8, 1994
    Date of Patent: June 5, 2001
    Assignee: Sandia Corporation
    Inventors: Kevin F. McCarty, Robert J. Kee, Andrew E. Lutz, Ellen Meeks