Patents by Inventor Andrew Erickson

Andrew Erickson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070084273
    Abstract: The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips of different geometries or orientations to scan a feature, such as a semiconductor line or trench, and to display the scan data such that tip artifacts from each tip can be omitted from the measurement by data from the other tips.
    Type: Application
    Filed: March 20, 2006
    Publication date: April 19, 2007
    Inventors: Casey Hare, Andrew Erickson
  • Publication number: 20060032296
    Abstract: A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system providing drive signals to a first Atomic Force Microscope (AFM) and calculated drive signals to additional AFMs based on the first drive signals and the relative position of the additional AFMs to the first AFM for consistent spaced motion. Scanning and Failure Analysis (FA) probing of multiple feature of interest using multiple APMs allows for reduced time for locating FA features to set up measurements.
    Type: Application
    Filed: September 29, 2005
    Publication date: February 16, 2006
    Inventors: Casey Hare, Andrew Erickson
  • Publication number: 20050097944
    Abstract: A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system providing drive signals to a first Atomic Force Microscope (AFM) and calculated drive signals to additional AFMs based on the first drive signals and the relative position of the additional AFMs to the first AFM for consistent spaced motion. Scanning and Failure Analysis (FA) probing of multiple feature of interest using multiple APMs allows for reduced time for locating FA features to set up measurements.
    Type: Application
    Filed: December 17, 2004
    Publication date: May 12, 2005
    Inventors: Casey Hare, Andrew Erickson
  • Patent number: D999291
    Type: Grant
    Filed: October 7, 2022
    Date of Patent: September 19, 2023
    Assignee: Tecla, Inc
    Inventors: Andrew Erickson, Michael Yeh
  • Patent number: D1093944
    Type: Grant
    Filed: April 28, 2024
    Date of Patent: September 23, 2025
    Assignee: Tecla, Inc.
    Inventors: Andrew Erickson, Michael Yeh