Abstract: Apparatus and methods for lifting a substrate from a substrate support include i. moving the substrate support and the substrate from a first position in a first direction toward lift pins, the substrate support having through holes each of which configured to receive a corresponding lift pin; ii. while moving the substrate support and the substrate, contacting the substrate with the lift pins; iii. upon contacting the lift pins, determining a force exerted on the lift pins; iv. comparing the determined force on the lift pins to a predetermined threshold force; and v. determining that the force on the lift pins is greater than or equal to the threshold force, and moving the substrate support away from the lift pins in a second direction opposite the first direction.