Abstract: Corner rounding of negative features is reduced by etching a targeted opening defined by the intersection of a hard mask opening and a photoresist mask opening. Embodiments include forming a hard mask over an underlayer in which the targeted opening is to be formed in a targeted area, forming a first opening in the hard mask layer exposing a first portion of the underlayer including part of the targeted area, forming a photoresist mask over the hard mask, the photoresist mask having a second opening exposing the targeted area of the substrate and part of the hard mask, and forming the targeted opening in the targeted area.

Abstract: A method and device for control of a low-cost DC motor such as that suitable for portable or battery-powered applications are disclosed such that an intended behavior for the motor may be programmed without reliance on external equipment or specific expertise. The invention enables programming of a motor controlling device by means of physical manipulation of the motor. In other words, the invention allows for the training of a motor by demonstrating the intended behavior for the motor. The invention specifies a method of parsing an observation of the motor system into storable commands, while preserving information on motor response and conditions for execution. A motor controller device comprising an implementation of this method is also presented.