Patents by Inventor Andrew J. Brawley

Andrew J. Brawley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMOS FABRICATION OF A THIN-FILM BULK ACOUSTIC RESONATOR
    Publication number: 20150171823
    Abstract: A process of forming a thin-film bulk acoustic resonator (FBAR) device (130, 914) on a silicon-on-thin film aluminum-nitride on silicon (SOFTANOS) substrate (110) using a CMOS fabrication process is provided. The SOFTANOS substrate, which is an example of a high thermal conductivity silicon-on-insulator (SOI) substrate, comprises an aluminum nitride (AlN) layer (114) and a silicon layer (118). The AlN layer has low electrical conductivity, high thermal conductivity, and good piezoelectric properties. A CMOS device (140, 910) is formed in the silicon layer, and the FBAR device is formed in the AlN layer.
    Type: Application
    Filed: July 15, 2013
    Publication date: June 18, 2015
    Inventor: Andrew J. Brawley