Patents by Inventor Andrew J. Constant
Andrew J. Constant has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11894251Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: GrantFiled: January 5, 2022Date of Patent: February 6, 2024Assignee: Applied Materials, Inc.Inventors: Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf, Jeffrey C. Hudgens, Alexander Berger, William Tyler Weaver
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Patent number: 11817332Abstract: Embodiments of the disclosure are directed to load lock chambers and methods of using load lock chambers. The load lock chambers include a middle section, an upper section connected to the middle section and a lower section connected to the middle section. A slit valve in a facet on the outside of the middle section provides an opening to access the middle volume from outside the load lock.Type: GrantFiled: September 22, 2020Date of Patent: November 14, 2023Assignee: APPLIED MATERIALS, INC.Inventors: William T. Weaver, Andrew J. Constant, Shay Assaf, Jacob Newman
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Publication number: 20230187239Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a load lock disposed within the interior volume of the factory interface, and a factory interface robot disposed within the interior volume of the factory interface, wherein the factory interface robot is configured to transfer substrates between a set of substrate carriers and the load lock.Type: ApplicationFiled: February 9, 2023Publication date: June 15, 2023Inventors: Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti
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Patent number: 11637004Abstract: An alignment module for housing and cleaning masks. The alignment module comprises a mask stocker, a cleaning chamber, an alignment chamber, an alignment stage a transfer robot. The mask stocker is configured to house a mask cassette configured to store a plurality of masks. The cleaning chamber is configured to clean the plurality of masks by providing one or more cleaning gases into a chamber after a mask is inserted into the cleaning chamber. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer a mask from one or more of the alignment stage and the mask stocker to the cleaning chamber.Type: GrantFiled: April 14, 2020Date of Patent: April 25, 2023Assignee: Applied Materials, Inc.Inventors: Alexander N. Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Ramkumar Vellore, Kevin Moraes, Roey Shaviv
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Publication number: 20230113673Abstract: A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.Type: ApplicationFiled: October 12, 2021Publication date: April 13, 2023Inventors: Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant, Michael R. Rice, Shay Assaf, Srinivas Poshatrahalli Gopalakrishna, Devendra Channappa Holeyannavar, Douglas B. Baumgarten, Arunkumar Ramachandraiah, Narayanan Ramachandran
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Patent number: 11581203Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a first load lock disposed within the interior volume of the factory interface, and a first factory interface robot disposed within the interior volume of the factory interface, wherein the first factory interface robot is configured to transfer substrates between a first set of substrate carriers and the first load lock.Type: GrantFiled: August 3, 2021Date of Patent: February 14, 2023Assignee: Applied Materials, Inc.Inventors: Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti
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Patent number: 11538706Abstract: An alignment module for positioning a mask on a substrate comprises a mask stocker, an alignment stage, and a transfer robot. The mask stocker houses a mask cassette that stores a plurality of masks. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer one of the one or more masks from the mask stocker to the alignment stage and position the mask over the substrate. The alignment module may be part of an integrated platform having one or more transfer chambers, a factory interface having a substrate carrier chamber and one or more processing chambers. A carrier may be coupled to a substrate within the substrate carrier chamber and moved between the processing chambers to generate a semiconductor device.Type: GrantFiled: April 14, 2020Date of Patent: December 27, 2022Assignee: Applied Materials, Inc.Inventors: Alexander N. Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Ramkumar Vellore, Kevin Moraes, Roey Shaviv
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Patent number: 11469124Abstract: Embodiments of the present disclosure relate to a substrate transfer device having a contactless latch and contactless coupling providing the ability to lock and unlock the substrate transfer device at atmospheric and vacuum pressure with without particle generation at a base of the substrate transfer device, the contactless latch, and the contactless coupling. The substrate transfer device includes a lid having one or more lid grooves, a base having one or more base grooves, and a rotation member rotatably coupled to the lid. Each flange of one or more flanges of the substrate transfer device is rotatable in aligned lid grooves and base grooves, and each flange of the one or more flanges has an arm with a ferromagnetic material coupled thereto. The base is coupled to the lid when the ferromagnetic material of the arm is aligned and spaced from a magnetic material of a slot of the one or more base grooves.Type: GrantFiled: January 24, 2020Date of Patent: October 11, 2022Assignee: Applied Materials, Inc.Inventors: Shreyas Patil Shanthaveeraswamy, Ribhu Gautam, Kumaresan Nagarajan, Vijay Singh, Andrew J. Constant, Michael P. Karazim, Kim Ramkumar Vellore
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Patent number: 11414740Abstract: Embodiments of the present disclosure generally relate to a processing system for forming one or more layers of a photodiode. In one embodiment, the processing system includes a transfer chamber, a plurality of processing chambers, and a controller configured to cause a process to be performed in the processing system. The process includes performing a pre-clean process on a substrate, aligning and placing a first mask on the substrate, depositing a first layer on the substrate, and depositing a second layer on the substrate. The processing system can form layers of a photodiode in a low defect, cost effective, and high utilization manner.Type: GrantFiled: May 1, 2020Date of Patent: August 16, 2022Assignee: Applied Materials, Inc.Inventors: Alexander N. Lerner, Roey Shaviv, Michael P. Karazim, Kevin Vincent Moraes, Steven V. Sansoni, Andrew J. Constant, Jeffrey Allen Brodine, Kim Ramkumar Vellore, Amikam Sade, Niranjan Kumar
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Publication number: 20220130700Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: ApplicationFiled: January 5, 2022Publication date: April 28, 2022Inventors: Jacob NEWMAN, Ulrich OLDENDORF, Martin AENIS, Andrew J. CONSTANT, Shay ASSAF, Jeffrey C. HUDGENS, Alexander BERGER, William Tyler WEAVER
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Publication number: 20220068677Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a first load lock disposed within the interior volume of the factory interface, and a first factory interface robot disposed within the interior volume of the factory interface, wherein the first factory interface robot is configured to transfer substrates between a first set of substrate carriers and the first load lock.Type: ApplicationFiled: August 3, 2021Publication date: March 3, 2022Inventors: Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti
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Patent number: 11232965Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: GrantFiled: October 2, 2019Date of Patent: January 25, 2022Assignee: APPLIED MATERIALS, INC.Inventors: Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf, Jeffrey C. Hudgens, Alexander Berger, William Tyler Weaver
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Publication number: 20210090917Abstract: Embodiments of the disclosure are directed to load lock chambers and methods of using load lock chambers. The load lock chambers include a middle section, an upper section connected to the middle section and a lower section connected to the middle section. A slit valve in a facet on the outside of the middle section provides an opening to access the middle volume from outside the load lock.Type: ApplicationFiled: September 22, 2020Publication date: March 25, 2021Applicant: Applied Materials, Inc.Inventors: William T. Weaver, Andrew J. Constant, Shay Assaf, Jacob Newman
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Publication number: 20200385851Abstract: Embodiments of the present disclosure generally relate to a processing system for forming one or more layers of a photodiode. In one embodiment, the processing system includes a transfer chamber, a plurality of processing chambers, and a controller configured to cause a process to be performed in the processing system. The process includes performing a pre-clean process on a substrate, aligning and placing a first mask on the substrate, depositing a first layer on the substrate, and depositing a second layer on the substrate. The processing system can form layers of a photodiode in a low defect, cost effective, and high utilization manner.Type: ApplicationFiled: May 1, 2020Publication date: December 10, 2020Inventors: Alexander N. LERNER, Roey SHAVIV, Michael P. KARAZIM, Kevin Vincent MORAES, Steven V. SANSONI, Andrew J. CONSTANT, Jeffrey Allen BRODINE, Kim Ramkumar VELLORE, Amikam SADE, Niranjan KUMAR
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Publication number: 20200373183Abstract: An alignment module for positioning a mask on a substrate comprises a mask stocker, an alignment stage, and a transfer robot. The mask stocker houses a mask cassette that stores a plurality of masks. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer one of the one or more masks from the mask stocker to the alignment stage and position the mask over the substrate. The alignment module may be part of an integrated platform having one or more transfer chambers, a factory interface having a substrate carrier chamber and one or more processing chambers. A carrier may be coupled to a substrate within the substrate carrier chamber and moved between the processing chambers to generate a semiconductor device.Type: ApplicationFiled: April 14, 2020Publication date: November 26, 2020Inventors: Alexander N. LERNER, Michael P. KARAZIM, Andrew J. CONSTANT, Jeffrey A. BRODINE, Kim Ramkumar VELLORE, Kevin MORAES, Roey SHAVIV
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Publication number: 20200373134Abstract: An alignment module for housing and cleaning masks. The alignment module comprises a mask stocker, a cleaning chamber, an alignment chamber, an alignment stage a transfer robot. The mask stocker is configured to house a mask cassette configured to store a plurality of masks. The cleaning chamber is configured to clean the plurality of masks by providing one or more cleaning gases into a chamber after a mask is inserted into the cleaning chamber. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer a mask from one or more of the alignment stage and the mask stocker to the cleaning chamber.Type: ApplicationFiled: April 14, 2020Publication date: November 26, 2020Inventors: Alexander N. LERNER, Michael P. KARAZIM, Andrew J. CONSTANT, Jeffrey A. BRODINE, Kim Ramkumar VELLORE, Kevin MORAES, Roey SHAVIV
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Publication number: 20200286760Abstract: Embodiments of the present disclosure relate to a substrate transfer device having a contactless latch and contactless coupling providing the ability to lock and unlock the substrate transfer device at atmospheric and vacuum pressure with without particle generation at a base of the substrate transfer device, the contactless latch, and the contactless coupling. The substrate transfer device includes a lid having one or more lid grooves, a base having one or more base grooves, and a rotation member rotatably coupled to the lid. Each flange of one or more flanges of the substrate transfer device is rotatable in aligned lid grooves and base grooves, and each flange of the one or more flanges has an arm with a ferromagnetic material coupled thereto. The base is coupled to the lid when the ferromagnetic material of the arm is aligned and spaced from a magnetic material of a slot of the one or more base grooves.Type: ApplicationFiled: January 24, 2020Publication date: September 10, 2020Inventors: Shreyas PATIL SHANTHAVEERASWAMY, Ribhu GAUTAM, Kumaresan NAGARAJAN, Vijay SINGH, Andrew J. CONSTANT, Michael P. KARAZIM, Kim Ramkumar VELLORE
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Publication number: 20200111692Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: ApplicationFiled: October 2, 2019Publication date: April 9, 2020Inventors: Jacob NEWMAN, Ulrich OLDENDORF, Martin AENIS, Andrew J. CONSTANT, Shay ASSAF, Jeffrey C. HUDGENS, Alexander BERGER, William Tyler WEAVER
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Publication number: 20190375105Abstract: Electronic device processing systems may include a mainframe housing having a transfer chamber, a first carousel assembly, a second carousel assembly, a first load lock, a second load lock, and a robot adapted to operate in the transfer chamber to exchange substrates between the first and second carousels and the first and second load locks. The robot may include first and second end effectors operable to extend and/or retract simultaneously or sequentially along substantially co-parallel lines of action. Methods and multi-axis robots for transporting substrates are described, as are numerous other aspects.Type: ApplicationFiled: August 21, 2019Publication date: December 12, 2019Inventors: William T. Weaver, Malcolm N. Daniel, JR., Robert B. Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade, Andrew J. Constant, Stephen C. Hickerson, Jeffrey C. Hudgens, Marvin L. Freeman
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Patent number: 10427303Abstract: Electronic device processing systems may include a mainframe housing having a transfer chamber, a first carousel assembly, a second carousel assembly, a first load lock, a second load lock, and a robot adapted to operate in the transfer chamber to exchange substrates between the first and second carousels and the first and second load locks. The robot may include first and second end effectors operable to extend and/or retract simultaneously or sequentially along substantially co-parallel lines of action. Methods and multi-axis robots for transporting substrates are described, as are numerous other aspects.Type: GrantFiled: March 14, 2014Date of Patent: October 1, 2019Assignee: Applied Materials, Inc.Inventors: William T. Weaver, Malcolm N. Daniel, Jr., Robert B. Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade, Andrew J. Constant, Stephen C. Hickerson, Jeffrey C. Hudgens, Marvin L. Freeman