Abstract: A permanent magnet motor is provided with a housing, a rotating shaft supported within the housing, and magnetic coils arranged within the housing. A hydrostatic bearing is disposed on the rotating shaft, the hydrostatic bearing having a permanent magnet incorporated therewith that restricts movement of the rotating shaft in a radial direction.

Abstract: Using radial air bearings to support the rotor at the perimeter, vertical axis wind turbines (VAWTs) are less expensive and faster to build. With just one moving part, the rotor, direct-drive generation may be employed to eliminate the drive line, gear box, and bearings at the generator. The bearings and generator are the lowest turbine components, allowing ground-level service. This low center-of-gravity and broad base conveniently allow for flotation. Such turbines can be manufactured onshore, towed out 30 or more miles into class 6 winds, tethered into a mooring field and plugged in. No foundation on the seafloor or assembly at sea is required. Additionally, power can be transmitted to land lines through current and retired power plants for “grid recycling”. These advantages dramatically improve the return on investment, the reliability of the energy stream and the ability to usefully locate the turbine.

Abstract: A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder, but not much more. The perimeter of both top and bottom of the stage has air bearing surfaces separated from the recess by differentially pumped grooves and seal lands. The air bearing lands are guided between two reference surfaces and the seal lands, being substantially coplanar, create a resistance to flow between the bearings and the recess. On the other side of one of the reference plates mounts the radiation source or process. The opposite reference plate may have a large aperture, non-contact pumping port. This improves vacuum capability and stage precision. The stage may operate in a vacuum environment itself or can provide multiple stages moving between processes or inspection steps within the same tool or process sequence.

Abstract: A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder but not much more. The perimeter of the recessed side has an air bearing surface separated from the recess by differentially pumped groves and seal lands. The air bearing lands are urged against a reference plate guide surface and the seal lands being substantially coplanar create a resistance to flow between the groves and recess, on the other side of the base reference plate mounts the radiation source. The VCS may operate in a vacuum environment itself, or in another preferred embodiment, it provides the possibility for multiple stages moving between process or inspection steps within the same tool or process sequence.

Abstract: A novel means for manufacturing a precision linear or rotary motion system that is comprised of one or a set of precision machine bearing rails (i.e., long straight and parallel surfaces, or a single straight shaft), precision manufactured modular bearing pads, and a carriage or housing that surrounds the bearing pads when they are placed onto the rails and held in place by placing a vacuum on the port normally used to supply pressurized lubricant to the bearing rails, but leaves a gap between the rough surface of the housing or the carriage and the backsides of the bearing pads, into which gap a stable epoxy is injected to fill the gap between the backs of the bearing pads and the inner rough surface of the carriage.