Patents by Inventor Andrew J. Ruspini

Andrew J. Ruspini has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for generating plasma
    Patent number: 6143084
    Abstract: An apparatus comprising a semiconductor processing chamber, a plasma generator, and a pipe connecting a semiconductor processing chamber and the plasma generator. The plasma generator includes a generation chamber, a radio frequency generator which generates an ion plasma within the generation chamber, and a magnetic device which confines the plasma primarily within a center region of the generation chamber.
    Type: Grant
    Filed: March 19, 1998
    Date of Patent: November 7, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Steven T. Li, Andrew J. Ruspini, Henry Ho, Yu Chang, Aihua Chen, Binh Bui
  • Apparatus for cooling a plasma generator
    Patent number: 6116186
    Abstract: An apparatus comprising a semiconductor processing chamber, a plasma generator, and a pipe connecting a semiconductor processing chamber and the plasma generator. The plasma generator includes a generation chamber, a radio frequency generator which generates an ion plasma within the generation chamber, a magnetic device which confines the plasma primarily within a center region of the generation chamber, and a thermally conductive member disposed around the outer surface of the generation chamber for removing heat away from the chamber.
    Type: Grant
    Filed: March 19, 1998
    Date of Patent: September 12, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Steven T. Li, Andrew J. Ruspini, Henry Ho