Abstract: A separator apparatus and method are disclosed. The separator apparatus comprises: an inlet operable to receive an effluent stream comprising a fluid and particles; a centrifugal separator comprising a radial fan and a centrifugal particle separator operable to separate at least some of the particles from the fluid; a fluid outlet for providing the fluid; and a particle outlet for providing the particles separated from the fluid. In this way, particles may be removed effectively from the fluid in the effluent stream without the need for an inconvenient electrostatic precipitator or other large particle separator. Instead, the apparatus provides for improved particle capture and removal within a smaller footprint. This provides for a more efficient and compact device.

Abstract: A vacuum system pipe coupling includes a first coupling member and a second coupling member. The vacuum system pipe coupling has a seal system that is to be positioned to seal between the first and second coupling members and a securing system to releasably secure the first coupling member to the second coupling member. The seal system has an inner seal element and an outer seal element spaced from the inner seal element. The first coupling member is provided with a flow passage configured to conduct a pressurized gas to a space between the inner and outer seal elements to shield the outer seal element from fluid flowing through the pipe coupling in the event of failure of the inner seal element.

Abstract: A radiant burner for treating an effluent gas stream from a manufacturing process tool may include: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; and a plenum surrounding the porous sleeve supplying the combustion materials to the porous sleeve, the plenum being configured to provide the combustion materials with varying stoichiometry along a length of the porous sleeve. This approach of varying the stoichiometric ratios of the combustion materials correspondingly varies the heat generated by those combustion materials along the length of the porous sleeve. By varying the stoichiometry of the combustion materials to compensate for variations in the heat generated within the combustion chamber along the length of the porous sleeve, a more uniform temperature can be achieved along the length of the porous sleeve within the combustion chamber.

Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.

Abstract: An inlet assembly for a burner and a method are disclosed. The inlet assembly comprises: an inlet nozzle defining an inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the burner, a non-circular outlet aperture, and a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying the effluent gas stream from the inlet aperture to the outlet aperture for delivery to the combustion chamber of the burner, the nozzle bore having an inlet portion extending from the inlet aperture and an outlet portion extending to the non-circular outlet aperture. In this way, the non-circular outlet aperture provides a non-circular effluent gas stream flow into the combustion chamber. The non-circular effluent gas flow enables a greater volume of effluent gas stream to be introduced into the combustion chamber whilst still achieving or exceeding the required levels of abatement.

Abstract: At least one gaseous impurity, for example silane, is removed by absorption from a feed gas stream, for example a gas stream comprising nitrogen and hydrogen, the gaseous impurity being less volatile than the feed gas stream. The absorption is effected by a sub-cooled absorbent at a first cryogenic temperature and a first pressure. The absorbent is typically propane. The absorption may be conducted in a liquid-vapor contact column (130). Absorbent containing impurity may be regenerated in a regeneration vessel 150 and returned to the column (130).

Abstract: Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.

Abstract: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.

Abstract: Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.

Abstract: Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.

Abstract: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.

Abstract: An inlet assembly for a burner includes a manifold having an inlet aperture and a coaxially aligned outlet aperture, the manifold having a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying an effluent gas from an inlet pipe coupleable with the inlet aperture to the outlet aperture for delivery to a combustion chamber of the burner. A nozzle bore scraper is housed within the nozzle bore. An actuator is operable to reciprocate the nozzle bore scraper relative to the nozzle bore, the nozzle bore scraper reciprocating along the longitudinal axis within the nozzle bore between a rest position and an actuated position to reduce effluent gas deposits within the nozzle bore.

Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing processing tool and comprises: a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of said effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.

Abstract: A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes: a porous sleeve at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber; and an electrical energy device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve which heats the treatment materials as they pass through the porous sleeve into the treatment chamber. In this way, electrical energy, rather than combustion, is used to raise the temperature within the treatment chamber in order to treat the effluent gas stream.

Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool, the radiant burner comprises: a sintered metal fibre sleeve through which combustion materials pass for combustion proximate to an inner combustion surface of the sintered metal fibre sleeve; and an insulating sleeve surrounding the sintered metal to fibre sleeve and through which the combustion materials pass. In this way, a radiant burner is provided which does not crack due to rapid cycling caused by frequent idle steps during which the burner is extinguished. Also, by providing an insulating sleeve, the temperature within the radiant burner and the temperature of an outer surface of the radiant burner remain comparable with existing ceramic burners. This enables the radiant burner to be substituted in place of existing ceramic burners as a line-replaceable unit which does not suffer from cracking during such frequent and short-duration periods of process tool inactivity.

Abstract: A separator apparatus and method are disclosed. The separator apparatus comprises: an inlet operable to receive an effluent stream comprising a fluid and particles; a centrifugal separator comprising a radial fan and a centrifugal particle separator operable to separate at least some of the particles from the fluid; a fluid outlet for providing the fluid; and a particle outlet for providing the particles separated from the fluid. In this way, particles may be removed effectively from the fluid in the effluent stream without the need for an inconvenient electrostatic precipitator or other large particle separator. Instead, the apparatus provides for improved particle capture and removal within a smaller footprint. This provides for a more efficient and compact device.

Abstract: An abatement apparatus and method are disclosed. The abatement apparatus for treating an effluent stream from a semiconductor processing tool comprises: a first treatment stage operable to combust the effluent stream to provide a combusted effluent steam and to treat the combusted effluent stream with water to provide a first stage treated effluent stream comprising treated fluid together with combustion particles and water; and a second treatment stage operable to receive the first stage treated effluent stream at an inlet and to separate centrifugally at least some of the combustion particles and the water from the treated fluid which is provided at a treated fluid outlet as a second stage treated effluent stream. In this way, particles and water may be removed effectively from the combusted effluent stream without the need for an inconvenient electrostatic precipitator. Instead, the second treatment stage provides for improved particle capture within a smaller footprint.

Abstract: A vacuum system pipe coupling includes a first coupling member and a second coupling member. The vacuum system pipe coupling has a seal system that is to be positioned to seal between the first and second coupling members and a securing system to releasably secure the first coupling member to the second coupling member. The seal system has an inner seal element and an outer seal element spaced from the inner seal element. The first coupling member is provided with a flow passage configured to conduct a pressurised gas to a space between the inner and outer seal elements to shield the outer seal element from fluid flowing through the pipe coupling in the event of failure of the inner seal element.

Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.

Abstract: A process gas abatement apparatus and method are disclosed. The process gas abatement apparatus comprises: a burner comprising: a combustion chamber operable to receive an effluent gas stream from a manufacturing process tool to be treated within the combustion chamber at a sub-atmospheric pressure, the combustion chamber being further operable to receive a fuel, oxidant and diluent, the fuel, oxidant and diluent controlling combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream, the diluent being condensable in the treated exhaust stream. By providing a diluent in the form of, for example, an inert condensable, the volume gain within the combustion chamber is reduced, which reduces the volume of the exhaust stream and reduces the volumetric load on the second pump. The volume gain reduces because the diluent shifts phase in the exhaust stream, thereby effectively removing the contribution of the diluent to the volume of the exhaust stream.