Patents by Inventor Andrew Keith WHITTAKER

Andrew Keith WHITTAKER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHICALLY PRODUCED FEATURES
    Publication number: 20160004163
    Abstract: The present invention relates to a method for modifying line edge roughness on a lithographically-produced feature in a material, the method comprising applying a block copolymer to an area on the feature having line edge roughness, the block copolymer comprising a charged hydrophilic polymer block and a non-charged hydrophilic polymer block.
    Type: Application
    Filed: February 25, 2014
    Publication date: January 7, 2016
    Inventors: Idriss BLAKEY, Ya-Mi CHUANG, Andrew Keith WHITTAKER, Kevin Stanley JACK