Abstract: Autonomous vehicles (AVs) may have processors to perform compute operations. These processors may be susceptible to overheating, due to one or more mechanical failures that may occur in the assembly that encloses the processors. To proactively address potential overheating of these processors, temperature of the processors can be monitored over time, e.g., at launch and during AV operation. A temperature profile line can be fitted to envelop the temperature data samples. The temperature profile line can indicate an extent of overheating, the rate of regression of the assembly's ability to cool the processors and predict when the processor may reach a critical temperature in the future. Based on one or more parameters that define the temperature profile line, it is possible to determine a regression profile of the processor. The regression profile can dictate whether to take an action to compensate for the regression.

Abstract: Provided herein are methods and systems for reducing roughness of an EUV resist and improving etched features. The methods involve descumming an EUV resist, filling divots of the EUV resist, and protecting EUV resists with a cap. The resulting EUV resist has smoother features and increased selectivity to an underlying layer, which improves the quality of etched features. Following etching of the underlying layer, the cap may be removed.

Abstract: Provided herein are methods and systems for reducing roughness of an EUV resist and improving etched features. The methods involve descumming an EUV resist, filling divots of the EUV resist, and protecting EUV resists with a cap. The resulting EUV resist has smoother features and increased selectivity to an underlying layer, which improves the quality of etched features. Following etching of the underlying layer, the cap may be removed.

Abstract: This description provides an autonomous or semi-autonomous excavation vehicle that is capable of navigating through a dig site and carrying an excavation routine using a system of sensors physically mounted to the excavation vehicle. The sensors collect one or more of spatial, imaging, measurement, and location data representing the status of the excavation vehicle and its surrounding environment. Based on the collected data, the excavation vehicle executes instructions to perform an excavation routine by excavating earth from a hole using an excavation tool positioned at a single location within the site. The excavation vehicle is also able to carry out numerous other tasks, such as checking the volume of excavated earth in an excavation tool, navigating the excavation vehicle over a distance while continuously excavating earth from a below surface depth, and preparing a digital terrain model of the site as part of a process for creating the excavation routine.

Abstract: This description provides an autonomous or semi-autonomous excavation vehicle that is capable of navigating through a dig site and carrying an excavation routine using a system of sensors physically mounted to the excavation vehicle. The sensors collect one or more of spatial, imaging, measurement, and location data representing the status of the excavation vehicle and its surrounding environment. Based on the collected data, the excavation vehicle executes instructions to perform an excavation routine by excavating earth from a hole using an excavation tool positioned at a single location within the site. The excavation vehicle is also able to carry out numerous other tasks, such as checking the volume of excavated earth in an excavation tool, navigating the excavation vehicle over a distance while continuously excavating earth from a below surface depth, and preparing a digital terrain model of the site as part of a process for creating the excavation routine.

Abstract: This description provides an autonomous or semi-autonomous excavation vehicle that is capable of navigating through a dig site and carrying an excavation routine using a system of sensors physically mounted to the excavation vehicle. The sensors collect one or more of spatial, imaging, measurement, and location data representing the status of the excavation vehicle and its surrounding environment. Based on the collected data, the excavation vehicle executes instructions to perform an excavation routine by excavating earth from a hole using an excavation tool positioned at a single location within the site. The excavation vehicle is also able to carry out numerous other tasks, such as checking the volume of excavated earth in an excavation tool, navigating the excavation vehicle over a distance while continuously excavating earth from a below surface depth, and preparing a digital terrain model of the site as part of a process for creating the excavation routine.

Abstract: This description provides an autonomous or semi-autonomous earth shaping vehicle that is capable of cooperatively filling earth into a fill location in a dig site. A first earth shaping vehicle configured with a hauling tool carrying a volume of earth navigates to the fill location. At the fill location, the first earth shaping vehicle navigates over a target tool path to fill earth from the hauling tool into the fill location. As the first earth shaping vehicle fills earth into the fill location, a measurement sensor coupled to the first earth shaping vehicle measures a compaction level of earth filled into the fill location. If the measured compaction level is determined to be below a threshold compaction level, the first earth shaping vehicle communicates a request for a second earth shaping vehicle configured with a compaction tool to compact earth in the fill location.

Abstract: This description provides an autonomous or semi-autonomous excavation vehicle that is capable of navigating through a dig site and carrying an excavation routine using a system of sensors physically mounted to the excavation vehicle. The sensors collect one or more of spatial, imaging, measurement, and location data representing the status of the excavation vehicle and its surrounding environment. Based on the collected data, the excavation vehicle executes instructions to perform an excavation routine by excavating earth from a hole using an excavation tool positioned at a single location within the site. The excavation vehicle is also able to carry out numerous other tasks, such as checking the volume of excavated earth in an excavation tool, navigating the excavation vehicle over a distance while continuously excavating earth from a below surface depth, and preparing a digital terrain model of the site as part of a process for creating the excavation routine.

Abstract: This description provides an autonomous or semi-autonomous earth shaping vehicle that is capable of cooperatively filling earth into a fill location in a dig site. A first earth shaping vehicle configured with a hauling tool carrying a volume of earth navigates to the fill location. At the fill location, the first earth shaping vehicle navigates over a target tool path to fill earth from the hauling tool into the fill location. As the first earth shaping vehicle fills earth into the fill location, a measurement sensor coupled to the first earth shaping vehicle measures a compaction level of earth filled into the fill location. If the measured compaction level is determined to be below a threshold compaction level, the first earth shaping vehicle communicates a request for a second earth shaping vehicle configured with a compaction tool to compact earth in the fill location.

Abstract: This description provides an autonomous or semi-autonomous earth shaping vehicle that is capable of cooperatively executing an earth shaping routine in a dig site with other earth shaping vehicles. A first earth shaping vehicle configured with a tool for excavating earth navigates to a dig location containing earth to be excavated. The first earth shaping vehicle identifies a loading location where the first vehicle may transfer earth to a second earth shaping vehicle configured with a tool for hauling earth between locations. Upon navigating to the loading location and detecting the second earth shaping vehicle at the loading location, the first earth shaping vehicle transfers earth from its excavation tool to the hauling tool of the second earth shaping vehicle.

Abstract: Provided herein are methods and systems for reducing roughness of an EUV resist and improving etched features. The methods involve descumming an EUV resist, filling divots of the EUV resist, and protecting EUV resists with a cap. The resulting EUV resist has smoother features and increased selectivity to an underlying layer, which improves the quality of etched features. Following etching of the underlying layer, the cap may be removed.

Abstract: A method for patterning a substrate includes providing a substrate, and depositing a multi-layer stack including N layers on the substrate. N is an integer greater than one. The N layers include N mean free paths for secondary electrons, respectively. The method includes depositing a photoresist layer on the multi-layer stack, wherein the N mean free paths converge in the photoresist layer. Another method for patterning a substrate includes providing a substrate and depositing a layer on the substrate. The layer includes varying mean free paths for secondary electrons. The method includes depositing a photoresist layer on the layer. The varying mean free paths for secondary electrons converge in the photoresist layer.

Abstract: This description provides an autonomous or semi-autonomous excavation vehicle that is capable of navigating through a dig site and carrying an excavation routine using a system of sensors physically mounted to the excavation vehicle. The sensors collect one or more of spatial, imaging, measurement, and location data representing the status of the excavation vehicle and its surrounding environment. Based on the collected data, the excavation vehicle executes instructions to perform an excavation routine by excavating earth from a hole using an excavation tool positioned at a single location within the site. The excavation vehicle is also able to carry out numerous other tasks, such as checking the volume of excavated earth in an excavation tool, navigating the excavation vehicle over a distance while continuously excavating earth from a below surface depth, and preparing a digital terrain model of the site as part of a process for creating the excavation routine.

Abstract: A method includes ingesting event data over a network for a plurality of events obtained by disparate computing resources. Each event is associated with a respective timestamp and one or more ingestion-attributes. The method includes identifying whether the corresponding event is associated with any custom indexing-attributes defined by a user. The method also includes indexing the corresponding event into a data store as structured data based on the respective timestamp, the one or more ingestion-attributes, and any identified custom indexing-attributes. The method includes evicting any of the events of the event data in the data store for a period of time that satisfies an eviction time period threshold. The method also includes retrieving the data from the data store that is associated with the time range, the ingestion-attributes, or the one custom indexing-attributes.

Abstract: A method includes ingesting event data over a network for a plurality of events obtained by disparate computing resources. Each event is associated with a respective timestamp and one or more ingestion-attributes. The method includes identifying whether the corresponding event is associated with any custom indexing-attributes defined by a user. The method also includes indexing the corresponding event into a data store as structured data based on the respective timestamp, the one or more ingestion-attributes, and any identified custom indexing-attributes. The method includes evicting any of the events of the event data in the data store for a period of time that satisfies an eviction time period threshold. The method also includes retrieving the data from the data store that is associated with the time range, the ingestion-attributes, or the one custom indexing-attributes.

Abstract: This description provides an autonomous or semi-autonomous earth shaping vehicle that is capable of cooperatively executing an earth shaping routine in a dig site with other earth shaping vehicles. A first earth shaping vehicle configured with a tool for excavating earth navigates to a dig location containing earth to be excavated. The first earth shaping vehicle identifies a loading location where the first vehicle may transfer earth to a second earth shaping vehicle configured with a tool for hauling earth between locations. Upon navigating to the loading location and detecting the second earth shaping vehicle at the loading location, the first earth shaping vehicle transfers earth from its excavation tool to the hauling tool of the second earth shaping vehicle.

Abstract: This description provides an autonomous or semi-autonomous earth shaping vehicle that is capable of cooperatively hauling earth from a first location to a second location in a dig site with other earth shaping vehicles. A first earth shaping vehicle navigates through a set of coordinates within the coordinate space that represent a path from the start location to the end location. As the first earth shaping vehicle navigates towards the end location, the set of coordinates are dynamically updated to avoid collisions with neighboring earth shaping vehicles in the dig site. The updates to the set of coordinates are determines based on a position of the first earth shaping vehicle relative to a position of the second earth shaping vehicle. The velocity of the first earth shaping vehicle may be adjusted to maintain a threshold distance between the first earth shaping vehicle and each neighboring earth shaping vehicle.

Abstract: This description provides an autonomous or semi-autonomous earth shaping vehicle that is capable of cooperatively filling earth into a fill location in a dig site. A first earth shaping vehicle configured with a hauling tool carrying a volume of earth navigates to the fill location. At the fill location, the first earth shaping vehicle navigates over a target tool path to fill earth from the hauling tool into the fill location. As the first earth shaping vehicle fills earth into the fill location, a measurement sensor coupled to the first earth shaping vehicle measures a compaction level of earth filled into the fill location. If the measured compaction level is determined to be below a threshold compaction level, the first earth shaping vehicle communicates a request for a second earth shaping vehicle configured with a compaction tool to compact earth in the fill location.

Abstract: A method includes ingesting event data over a network for a plurality of events obtained by disparate computing resources. Each event is associated with a respective timestamp and one or more ingestion-attributes. The method includes identifying whether the corresponding event is associated with any custom indexing-attributes defined by a user. The method also includes indexing the corresponding event into a data store as structured data based on the respective timestamp, the one or more ingestion-attributes, and any identified custom indexing-attributes. The method includes evicting any of the events of the event data in the data store for a period of time that satisfies an eviction time period threshold. The method also includes retrieving the data from the data store that is associated with the time range, the ingestion-attributes, or the one custom indexing-attributes.

Abstract: This description provides an autonomous or semi-autonomous excavation vehicle that is capable of navigating through a dig site and carrying an excavation routine using a system of sensors physically mounted to the excavation vehicle. The sensors collect one or more of spatial, imaging, measurement, and location data representing the status of the excavation vehicle and its surrounding environment. Based on the collected data, the excavation vehicle executes instructions to carry out an excavation routine by filling earth into a hole within the site and compacting the earth. The excavation vehicle is also able to carry out numerous other tasks, such as checking the volume of excavated earth in an excavation tool, and helping prepare a digital terrain model of the site as part of a process for creating the excavation routine.