Abstract: The disclosure relates to a target for physical vapor deposition processes. In one embodiment, a physical vapor deposition (PVD) target, includes a monolithic target with a support region partially defined by a process face and radial sidewalls; and a recess within a mounting face of the monolithic target, the recess disposed opposite the process face and extending radially outward of the radial sidewalls.

Abstract: According to embodiments of the present invention, a fluorescence analysis system includes a light emitting diode (LED) array to excite a fluorophor sample for analysis. The system includes an LED array driver that pulses the LEDs in the array with currents in excess of maximum rated current at low duty cycles to reduce LED degradation over time. An LED selection optimization process and software select the LEDs to be included in the array from among various colors and currents to be applied. The LED selection optimization process and software take filters and attenuation into consideration.