Abstract: A high surface area coil for use with a physical vapor deposition apparatus comprising a first surface. At least a portion of the first surface has a macrotexture with a surface roughness between about 15 ?m and about 150 ?m. At least a portion of the first surface has a microtexture with a surface roughness between about 2 ?m and 15 ?m.

Abstract: Disclosed herein is a sputtering chamber component comprising a particle trap, the particle trap comprising a patterned macrotexture formed on at least a portion of a surface of the sputtering chamber component. The patterned macrotexture has indentations having a depth and is arranged in a repeating pattern. The patterned macrotexture has first threads extending in a first direction, the first threads forming side walls separating adjacent indentations in a second direction. The patterned macrotexture has second threads extending in the second direction. The second direction is at an angle of greater than 0 and less than 180 degrees to the first direction, the second threads forming side walls separating adjacent indentations in the first direction. The patterned macrotexture has a random pattern microtexture formed on the patterned macrotexture; the microtexture has a height less than the depth of the indentations.

Abstract: The invention includes backing plates having coolant deflectors with at least a portion of each of the deflectors being nonlinear. Projections projecting from the backing plate are configured to insert into openings within a sputtering target. The invention includes targets having at least one opening to receive a fastener extending into the target through a back surface. The invention includes a target assembly having projections projecting from the backing plate and insertable within openings within the target. The invention includes a target assembly having a plurality of coolant deflectors disposed between the target and the backing plate. A segment of each of the deflectors is nonlinear. The invention includes methods of cooling a target. Coolant deflectors are disposed within a gap between the target and a backing plate with coolant deflectors being nonlinear along at least a portion of their length.