Patents by Inventor Andrew P. Lunday

Andrew P. Lunday has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor
    Patent number: 6971832
    Abstract: A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.
    Type: Grant
    Filed: August 4, 2004
    Date of Patent: December 6, 2005
    Assignee: Transfer Engineering and Manufacturing, Inc.
    Inventors: Michael A. Ackeret, Andrew P. Lunday
  • Wafer load lock and magnetically coupled linear delivery system
    Patent number: 6935828
    Abstract: A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical, drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.
    Type: Grant
    Filed: October 1, 2002
    Date of Patent: August 30, 2005
    Assignee: Transfer Engineering and Manufacturing, Inc.
    Inventors: Michael A. Ackeret, Andrew P. Lunday
  • Wafer load lock and magnetically coupled linear delivery system
    Publication number: 20040013501
    Abstract: A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical, drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.
    Type: Application
    Filed: October 1, 2002
    Publication date: January 22, 2004
    Inventors: Michael A. Ackeret, Andrew P. Lunday