Patents by Inventor Andrew R. Wank
Andrew R. Wank has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9073172Abstract: The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The polishing pad includes a polymeric matrix, the polymeric matrix having a polishing surface. In addition, polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. The polymeric microelements have an outer surface and being fluid-filled for creating texture at the polishing surface. And alkaline-earth metal oxide-containing regions are distributed within each of the polymeric microelements and spaced to coat less than 50 percent of the outer surface of the polymeric microelements.Type: GrantFiled: May 11, 2012Date of Patent: July 7, 2015Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.Inventors: David B. James, Donna M. Alden, Andrew R. Wank
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Patent number: 8894732Abstract: The invention provides a plurality of polymeric particles embedded with alkaline-earth metal oxide. The gas-filled polymeric microelements have a shell and a density of 5 g/liter to 200 g/liter. The shell has an outer surface and a diameter of 5 ?m to 200 ?m with the outer surface of the shell of the gas-filled polymeric particles having alkaline-earth metal oxide-containing particles embedded in the polymer. The alkaline-earth metal oxide-containing particles have an average particle size of 0.01 to 3 ?m distributed within each of the polymeric microelements to coat less than 50 percent of the outer surface of the polymeric microelements.Type: GrantFiled: May 11, 2012Date of Patent: November 25, 2014Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.Inventors: Andrew R. Wank, Donna M. Alden, David B. James
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Patent number: 8888877Abstract: The invention involves a method of preparing an alkaline-earth metal oxide-containing polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The method includes introducing a feed stream of gas-filled polymeric microelements into a gas jet, the polymeric microelements having varied density, varied wall thickness and varied particle size. The method passes the polymeric microelements in the gas jet adjacent a Coanda block, the Coanda block having a curved wall for separating the polymeric microelements with Coanda effect, inertia and gas flow resistance. Then it separates various alkaline earth metal oxide constituents from the curved wall of the Coanda block to clean the polymeric microelements.Type: GrantFiled: May 11, 2012Date of Patent: November 18, 2014Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.Inventors: Donna M. Alden, David B. James, Andrew R. Wank, James Murnane
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Publication number: 20130303061Abstract: The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The polishing pad includes a polymeric matrix, the polymeric matrix having a polishing surface. In addition, polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. The polymeric microelements have an outer surface and being fluid-filled for creating texture at the polishing surface. And alkaline-earth metal oxide-containing regions are distributed within each of the polymeric microelements paced to coat less than 50 percent of the outer surface of the polymeric microelements.Type: ApplicationFiled: May 11, 2012Publication date: November 14, 2013Inventors: David B. James, Donna M. Alden, Andrew R. Wank
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Publication number: 20130298472Abstract: The invention involves a method of preparing an alkaline-earth metal oxide-containing polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The method includes introducing a feed stream of gas-filled polymeric micro elements into a gas jet, the polymeric microelements having varied density, varied wall thickness and varied particle size. The method passes the polymeric microelements in the gas jet adjacent a Coanda block, the Coanda block having a curved wall for separating the polymeric microelements with Coanda effect, inertia and gas flow resistance. Then it separates various alkaline earth metal oxide constituents from the curved wall of the Coanda block to clean the polymeric microelements.Type: ApplicationFiled: May 11, 2012Publication date: November 14, 2013Inventors: Donna M. Alden, David B. James, Andrew R. Wank, James Murnane
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Publication number: 20130298473Abstract: The invention provides a plurality of polymeric particles embedded with alkaline-earth metal oxide. The gas-filled polymeric microelements have a shell and a density of 5 g/liter to 200 g/liter. The shell has an outer surface and a diameter of 5 ?m to 200 ?m with the outer surface of the shell of the gas-filled polymeric particles having alkaline-earth metal oxide-containing particles embedded in the polymer. The alkaline-earth metal oxide-containing particles have an average particle size of 0.01 to 3 ?m distributed within each of the polymeric microelements to coat less than 50 percent of the outer surface of the polymeric microelements.Type: ApplicationFiled: May 11, 2012Publication date: November 14, 2013Inventors: Andrew R. WANK, Donna M. ALDEN, David B. JAMES
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Patent number: 8357446Abstract: The invention provides a plurality of polymeric particles embedded with silicate that include gas-filled polymeric microelements. The gas-filled polymeric microelements have a shell and a density of 5 g/liter to 200 g/liter. The shell having an outer surface and a diameter of 5 ?m to 200 ?m with silicate particles embedded in the polymer. The silicate particles have an average particle size of 0.01 to 3 ?m. The silicate-containing regions are spaced to coat less than 50 percent of the outer surface of the polymeric microelements; and less than 0.1 weight percent total of the polymeric microelements is associated with i) silicate particles having a particle size of greater than 5 ?m; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric micro elements agglomerated with silicate particles to an average cluster size of greater than 120 ?m.Type: GrantFiled: November 12, 2010Date of Patent: January 22, 2013Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.Inventors: Andrew R. Wank, Donna M. Alden, Mark E. Gazze, Robert Gargione, Joseph K. So, David Drop, Mai Tieu Banh, Shawn Riley
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Patent number: 8257152Abstract: The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. It includes a polymeric matrix having a polishing surface. Polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. Silicate-containing regions distributed within each of the polymeric microelements coat less than 50 percent of the outer surface of the polymeric microelements. Less than 0.1 weight percent total of the polymeric microelements are associated with i) silicate particles having a particle size of greater than 5 ?m; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric microelements agglomerated with silicate particles to an average cluster size of greater than 120 ?m.Type: GrantFiled: November 12, 2010Date of Patent: September 4, 2012Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.Inventors: Andrew R. Wank, Donna M. Alden, Joseph K. So, Robert Gargione, Mark E. Gazze, David Drop, Colin F. Cameron, Jr., Mai Tieu Banh, Shawn Riley
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Patent number: 8202334Abstract: The method provides a method of preparing a silicate-containing polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The method includes introducing a feed stream of gas-filled polymeric microelements into a gas jet. The polymeric microelements have varied densities, varied wall thickness and varied particle size. Passing the gas-filled microelements in the gas jet adjacent a Coanda block, the Coanda block having a curved wall for separates the polymeric microelements with Coanda effect, inertia and gas flow resistance. The coarse polymeric microelements from the curved wall of the Coanda block to clean the polymeric microelements. The polymeric microelements collected contain less than 0.Type: GrantFiled: November 12, 2010Date of Patent: June 19, 2012Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.Inventors: Donna M. Alden, Andrew R. Wank, Robert Gargione, Mark E. Gazze, Joseph K. So, David Drop, Shawn Riley, Mai Tieu Banh
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Publication number: 20120117888Abstract: The invention provides a plurality of polymeric particles embedded with silicate that include gas-filled polymeric microelements. The gas-filled polymeric microelements have a shell and a density of 5 g/liter to 200 g/liter. The shell having an outer surface and a diameter of 5 ?m to 200 ?m with silicate particles embedded in the polymer. The silicate particles have an average particle size of 0.01 to 3 ?m. The silicate-containing regions are spaced to coat less than 50 percent of the outer surface of the polymeric microelements; and less than 0.1 weight percent total of the polymeric microelements is associated with i) silicate particles having a particle size of greater than 5 ?m; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric micro elements agglomerated with silicate particles to an average cluster size of greater than 120 ?m.Type: ApplicationFiled: November 12, 2010Publication date: May 17, 2012Inventors: Andrew R. Wank, Donna M. Alden, Mark E. Gazze, Robert Gargione, Joseph K. So, David Drop, Mai Tieu Banh, Shawn Riley
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Publication number: 20120122381Abstract: The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. It includes a polymeric matrix having a polishing surface. Polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. Silicate-containing regions distributed within each of the polymeric microelements coat less than 50 percent of the outer surface of the polymeric microelements. Less than 0.1 weight percent total of the polymeric microelements are associated with i) silicate particles having a particle size of greater than 5 ?m; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric microelements agglomerated with silicate particles to an average cluster size of greater than 120 ?m.Type: ApplicationFiled: November 12, 2010Publication date: May 17, 2012Inventors: Andrew R. Wank, Donna M. Alden, Joseph K. So, Robert Gargione, Mark E. Gazze, David Drop, Colin E. Cameron, JR., Mai Tieu Banh, Shawn Riley
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Publication number: 20120117889Abstract: The method provides a method of preparing a silicate-containing polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The method includes introducing a feed stream of gas-filled polymeric microelements into a gas jet. The polymeric microelements have varied densities, varied wall thickness and varied particle size. Passing the gas-filled microelements in the gas jet adjacent a Coanda block, the Coanda block having a curved wall for separates the polymeric microelements with Coanda effect, inertia and gas flow resistance. The coarse polymeric microelements from the curved wall of the Coanda block to clean the polymeric microelements. The polymeric microelements collected contain less than 0.Type: ApplicationFiled: November 12, 2010Publication date: May 17, 2012Inventors: Donna M. Alden, Andrew R. Wank, Robert Gargione, Mark E. Gazze, Joseph K. So, David Drop, Shawn Riley, Mai Tieu Banh