Patents by Inventor Andrew Ruspini

Andrew Ruspini has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization
    Patent number: 7101466
    Abstract: A sweeping linear magnetron is described. The magnetron has a cathode backing plate, a drive housing attached to the cathode backing plate and a motor held in the drive housing. The motor drives a yoke positioned within a cut-out in the backing plate. The yoke has a magnet pack attached thereto said yoke such that the magnet pack is adapted to being moved over a target material and wherein the target material is being sputtered within a vacuum chamber onto a substrate.
    Type: Grant
    Filed: September 19, 2003
    Date of Patent: September 5, 2006
    Assignee: KDF Electronic + Vacuum Services Inc
    Inventors: Subhadra Gupta, Andrew Ruspini
  • Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization
    Publication number: 20060157344
    Abstract: A sweeping linear magnetron is described. The magnetron has a cathode backing plate, a drive housing attached to the cathode backing plate and a motor held in the drive housing. The motor drives a yoke positioned within a cut-out in the backing plate. The yoke has a magnet pack attached thereto said yoke such that the magnet pack is adapted to being moved over a target material and wherein the target material is being sputtered within a vacuum chamber onto a substrate.
    Type: Application
    Filed: December 22, 2005
    Publication date: July 20, 2006
    Inventors: Subhadra Gupta, Andrew Ruspini
  • Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization
    Publication number: 20050061666
    Abstract: A sweeping linear magnetron is described. The magnetron has a cathode backing plate, a drive housing attached to the cathode backing plate and a motor held in the drive housing. The motor drives a yoke positioned within a cut-out in the backing plate. The yoke has a magnet pack attached thereto said yoke such that the magnet pack is adapted to being moved over a target material and wherein the target material is being sputtered within a vacuum chamber onto a substrate.
    Type: Application
    Filed: September 19, 2003
    Publication date: March 24, 2005
    Inventors: Subhadra Gupta, Andrew Ruspini