Patents by Inventor Andrew Scott Cornelius

Andrew Scott Cornelius has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linked vacuum processing tools and methods of using the same
    Patent number: 9147592
    Abstract: In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: September 29, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael Robert Rice, Jeffrey C. Hudgens, Steven V. Sansoni, Robert Irwin Decottignies, Dean C. Hruzek, Peter Irwin, Nir Merry
  • LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME
    Publication number: 20140044503
    Abstract: In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.
    Type: Application
    Filed: August 7, 2013
    Publication date: February 13, 2014
    Inventors: Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael Robert Rice, Jeffrey C. Hudgens, Steven V. Sansoni, Robert Irwin Decottignies, Dean C. Hruzek, Peter Irwin, Nir Merry