Abstract: Embodiments of the present disclosure generally relate to methods and apparatus for measuring and controlling local impedances at a substrate support in a plasma processing chamber during processing of a substrate. A substrate support includes a plurality of substrate support pins wherein the radio frequency voltage, current and phase of each of the plurality of substrate support pins are measured and impedances of the support pins are adjusted in real time. Each of the substrate support pins is coupled to an associated adjustable impedance circuit that may be remotely controlled. In one embodiment a variable capacitor is used to adjust the impedance of the impedance circuit coupled to the associated substrate support pin and may be remotely adjusted with a stepper motor.

Abstract: Improved inspection techniques are described herein for checking for the presence of and identifying surface defects on a honeycomb body. The improved inspection utilizes measurement of travel of an outer surface of the honeycomb body to collect images of the outer surface. The images are combined into a composite image showing the outer surface of the honeycomb body. The composite image is analyzed to identify surface defects.

Abstract: Disclosed herein are self-assembling protein nanoparticles comprising passenger molecules of interest.

Abstract: A transducing head and related fabrication method, and a system for information storage. The head includes a substrate comprising a relatively hard material, a transducer carrier on the substrate comprising a material that is soft relative to the substrate and which embeds one or more transducer elements, and a closure on the transducer carrier comprising a relatively hard material. A metal-to-metal interconnection secures the carrier to the transducer carrier.