Abstract: Systems and methods for producing carbon-based coatings featuring diamond-like carbon (DLC) structures on the internal surfaces of cylindrical or tube-like components is disclosed. The methods feature the use of plasma-enhanced chemical vapor deposition (PECVD) to provide a generally uniform coating on the surface. Longitudinally homogeneous plasma is ignited directly inside the tube-like component. A bipolar pulse with a reverse active plasma step is used. The pressure and bias voltage are selected so as to cause the deposition of a carbon-based coating on the inner surface.

Abstract: A chemical vapor deposition system for coating one or more workpieces is described herein. The deposition system includes a plurality of processing chambers which may be operated independently to increase throughput of the deposition system. Each chamber includes a modular fixture that is configured to maintain the workpieces in a predetermined arrangement which allows for a hollow cathode effect to be maintained in an Interior space of the chamber. The deposition system achieves significantly faster, higher-quality deposition and more complete, conformal coverage.

Abstract: Rapid plasma nitriding is achieved by harnessing the power and increased density of plasma discharges created by hollow cathodes. When opposing surfaces are maintained at the proper voltage, sub atmospheric pressure, and spacing, a phenomenon known as the hollow cathode effect creates additional hot oscillating electrons capable of multiple ionization events thereby increasing the number of ions and electrons per unit volume (plasma density). The present invention describes the harnessing of this phenomenon to rapidly plasma nitride metal surfaces and optionally rapidly deposit functional coatings in a continuous operation for duplex coatings.

Abstract: Rapid plasma nitriding is achieved by harnessing the power and increased density of plasma discharges created by hollow cathodes. When opposing surfaces are maintained at the proper voltage, sub atmospheric pressure, and spacing, a phenomenon known as the hollow cathode effect creates additional hot oscillating electrons capable of multiple ionization events thereby increasing the number of ions and electrons per unit volume (plasma density). The present invention describes the harnessing of this phenomenon to rapidly plasma nitride metal surfaces and optionally rapidly deposit functional coatings in a continuous operation for duplex coatings.

Abstract: A chemical vapor deposition system for coating one or more workpieces is described herein. The deposition system includes a plurality of processing chambers which may be operated independently to increase throughput of the deposition system. Each chamber includes a modular fixture that is configured to maintain the workpieces in a predetermined arrangement which allows for a hollow cathode effect to be maintained in an Interior space of the chamber. The deposition system achieves significantly faster, higher-quality deposition and more complete, conformal coverage.

Abstract: Systems and methods for producing carbon-based coatings featuring diamond-like carbon (DLC) structures on the internal surfaces of cylindrical or tube-like components is disclosed. The methods feature the use of plasma-enhanced chemical vapor deposition (PECVD) to provide a generally uniform coating on the surface. Longitudinally homogeneous plasma is ignited directly inside the tube-like component. A bipolar pulse with a reverse active plasma step is used. The pressure and bias voltage are selected so as to cause the deposition of a carbon-based coating on the inner surface.

Abstract: A modular, offset In-line vacuum processing system is disclosed. The system comprises a plurality of independently operable process chambers each configured to accommodate a given number of carriers, where each carrier may hold a set of independently biased substrates. Further, each process chamber may be configured to execute one or more steps in one or more processes performed on each set of substrates. A plurality of Independently operable transfer chambers may be configured to transfer each carrier to and from process chambers for completing each step in the one or more processes. As a result, the system is able to: simultaneously coat the sets of substrates via a designated coating process (i.e., unique to each set of carriers); obtain a set of desired coating properties for each set of parts; perform processes having varying process step lengths; coat parts of multiple geometries; shut down individual chambers without interrupting production capacity.

Abstract: The invention relates to a method for depositing high sp3 content amorphous carbon coatings onto external surfaces. This method allows adjustment of tribological properties, such as hardness, Young's modulus, wear resistance, and coefficient of friction as well as optical properties, such as refractive index. In addition, the resulting coatings are uniform and have high corrosion resistance. By controlling pressure, type of diamondoid precursor, and bias voltage, the method prevents the diamondoid precursor from fully breaking upon impact with the substrate. The diamondoid retains sp3 bonds which yields a high sp3 content film. This enables a faster deposition rate than would be possible without the use of a diamondoid precursor.

Abstract: An ultrasonic pool occupant sensing device capable of using ultrasonic pulses to analyze the occupancy level of a swimming pool. An ultrasonic transducer sends and receives ultrasonic pulses. A front end electronics has a driver for controlling the transducer, a pre-amplifier, band-pass filter, and amplifier combination for filtering received signals. The digital processing unit contains a timer unit for generating pulses, an AD converter for digitizing received pulses, a signal processor for determining data about the return pulse, and an I/O unit for transmitting data to the central processing unit. The data may be an estimate of the number of people in the sensor range, or it may be data about the return pulse that can be analyzed by the central processing unit.

Abstract: An ultrasonic pool occupant sensing device capable of using ultrasonic pulses to analyze the occupancy level of a swimming pool. An ultrasonic transducer sends and receives ultrasonic pulses. A front end electronics has a driver for controlling the transducer, a pre-amplifier, band-pass filter, and amplifier combination for filtering received signals. The digital processing unit contains a timer unit for generating pulses, an AD converter for digitizing received pulses, a signal processor for determining data about the return pulse, and an I/O unit for transmitting data to the central processing unit. The data may be an estimate of the number of people in the sensor range, or it may be data about the return pulse that can be analyzed by the central processing unit.

Abstract: An electrode assembly comprises a coil of electrode material surrounded by a shield having one or more outlets and a supply of shielding gas directed along an axis X-X of said coil before exiting from said shield.

Abstract: A method and system for coating the internal surfaces of a workpiece is presented. A bias voltage is connected to a workpiece, which functions as a cathode. A gas source and a vacuum source are coupled to each opening through a flow control system. The flow control system is capable of a first mode which enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. The flow control system also has a second mode which enables a first opening to function as a vacuum exhaust and a second opening to function as a gas inlet. The cycling may also be used to coat internal surfaces of a workpiece with a single opening. Cycling the flow control system between the first mode and second mode is performed until a uniform coating along the internal surfaces of the workpiece is achieved.

Abstract: A method and system for coating the internal surfaces of a localized area or section of a workpiece is presented. Conductive structures are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage is connected to a workpiece section, which functions as a cathode. A gas source and vacuum source are coupled to each conductive structure through a flow control system. The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.

Abstract: The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece. A source gas is introduced at an entrance opening, while a vacuum source is connected at an exit opening. Pressure within the workpiece is monitored and the resulting pressure information is used for maintaining a condition that exhibits the hollow cathode effect. Optionally, a pre-cleaning may be provided by introducing a hydrocarbon mixture and applying a negative bias to the workpiece, so as to sputter contaminants from the workpiece using argon gas. Argon gas may also be introduced during the coating processing to re-sputter the coating, thereby improving uniformity along the length of the workpiece. The coating may be a diamond-like carbon material having properties which are determined by controlling ion bombardment energy.

Abstract: An apparatus for coating surfaces of a workpiece is configured to establish a pressure gradient within internal passageways through the workpiece, so that the coating within the internal passageways exhibits intended characteristics, such as those relating to smoothness or hardness. The coating apparatus may include any or all of a number of cooperative systems, including a plasma generation system, a manipulable workpiece support system, an ionization excitation system configured to increase ionization within or around the workpiece, a biasing system for applying a selected voltage pattern to the workpiece, and a two-chamber system that enables the plasma generation to take place at a first selected pressure and the deposition to occur at a second selected pressure.

Abstract: An annular ring assembly is provided in which mechanical elements of the retaining ring assembly maintain strict planar flatness, rigidity, high tolerances and surface stability control. Additionally, glues, adhesives, and epoxies are eliminated from the construction of the plastic retaining and backing ring assembly. Further, adverse chemical reaction and contamination from adhesives that are typically in direct contact with chemical slurry and substrate layers undergoing polishing are eliminated. As a result, the present invention provides a low cost alternative to suppliers and manufacturers of retaining rings and facilitates a method to exchange, recondition and recycle the retaining ring for an infinite period, thus reducing consumable waste materials. Further, the ring assembly maintains uniform mechanical properties and strict tolerances after post reconditioning, thus reducing the variability and maintaining process consistency.

Abstract: A gas containment and delivery system that can be efficiently and cost-effectively adapted to a wide variety of gas delivery needs. The system has a gas containment box that can be efficiently adapted to provide double containment for sections of toxic gas lines having gas delivery components such as valves, regulators, and gauges. The system may be either floor-mounted or wall-mounted, and can be used in a wide variety of semiconductor fabrication facilities.