Abstract: The present invention relates to a UV-curable inkjet composition comprising ?20% (w/w) of any blend of monofunctional acrylate monomers, ?7.5% (w/w) of any blend of photoinitiators, and one or more acrylated amines.

Abstract: The disclosure recognizes that it is better to not start monitoring a controllable process than to monitor that process with an optical instrument, such as a process controlling instrument/sensor, when that optical instrument is not operating properly. Accordingly, the disclosure relates to novel features for checking that an optical instrument, such as a spectrometer, is working properly before being used to monitor a semiconductor process. In one aspect the disclosure provides a system for evaluation and verification of an operational state of an optical instrument. In one example, the system includes: (1) an integrated light source, (2) an optical sensor for collecting light from the integrated light source, (3) a controller controlling the integrated light source and the optical sensor, and (4) a processor for processing collected optical signal data obtained from the light and deriving a metric indicative of the operational state.

Abstract: An optical instrument of very high resolution is provided that can be used for monitoring semiconductor processes. Very high resolution may be considered in this application space to be resolutions sufficient to permit resolving of individual molecular rovibrational emission lines. In one example an optical instrument is provided that includes: (1) an optical interface that receives an optical fiber, (2) a narrow band pass filter that filters out a portion of an optical signal received via the optical fiber, (3) optical components that are selectively combined to process at least a portion of the unfiltered optical signal, wherein the optical components include a sensor that receives the unfiltered optical signal, and (4) one or more processors that process electrical signals from the sensor. The optical instrument can be a spectrometer suitable for a process control instrument.

Abstract: The invention relates to a dispenser, such as of the type that is adapted to be squeezed to dispense its contents. The dispenser comprises: at least one container engaging element adapted to engage a flexible container containing contents to be dispensed, the at least one container engaging element including a dispensing opening configured to receive and dispense the contents of the flexible container through the dispensing opening; and a base operatively associated with the at least one container engaging element and including an opening configured to receive the dispensing opening of the at least one container engaging element; wherein the at least one container engaging element is configured to maintain at least a portion of the flexible container in a predetermined position, wherein the contents of the flexible container are dispensed upon pressure being applied to the flexible container.

Abstract: A device for applying a compressive force to the uterus, the device comprising a contact portion for contacting the uterus and providing a compressive force thereto, and at least two elongate handles each extending from the contact portion along a respective longitudinal axis. The at least two elongate handles are configured to facilitate insertion of the device into the body and handling of the device from outside the body when inserted. At least a part of the contact portion is configured to be radially moveable relative to the longitudinal axes between a first radial position and a second radial position where the second radial position is radially outward of the first radial position.

Abstract: A system and method of use for simplifying the measurement of various properties of complex semiconductor structures is provided. The system and method supports reduction of structure complexity and modeling for optical monitoring and permits determination of film thicknesses and feature depths during semiconductor manufacturing processes.

Abstract: The disclosure provides an optical calibration device for in-chamber calibration of optical signals associated with a processing chamber, a characterization system for plasma processing chambers, methods of characterizing plasma processing chambers, and a chamber characterizer. In one example, the optical calibration device includes: (1) an enclosure, (2) an optical source located within the enclosure and configured to provide a source light having a continuous spectrum, and (3) optical shaping elements located within the enclosure and configured to form the source light into a calibrating light that approximates a plasma emission during an operation within the processing chamber.

Abstract: Systems and methods for refining search query results are provided. A first user input is received. A plurality of search categories for the first input are determined. The plurality of search categories are then associated with different segments of a first slider. The first slider allows a user to generate a search query for the first user input among the plurality of associated categories. The search query returns a set of search query results. A plurality of sub categories may be determined for each search category. The plurality of sub-categories are associated with different segments of a second slider. Movement of a slider button of a second slider to a first segment of the second slider may be detected. The search query results may be filtered based on the first segment of the second slider. The filtering adjusts a level of detail of the set of search query results.

Abstract: A system and method of use for simplifying the measurement of various properties of complex semiconductor structures is provided. The system and method supports reduction of structure complexity and modeling for optical monitoring and permits determination of film thicknesses and feature depths during semiconductor manufacturing processes.

Abstract: The present invention is directed to a gas line electron beam exciter, gas line electron beam excitation system and method for exciting a gas using an electron beam exciter. The electron beam exciter generally comprises a variable density electron source for generating a cloud of electrons in an electron chamber and a variable energy electron extractor for accelerating electrons from the electron chamber as an electron beam and into an effluent stream for fluorescing species in the effluent. The electron density of the electron beam is variably controlled by adjusting the excitation power applied to the variable density electron source. The electrons in the electron chamber reside at a reference electrical potential of the chamber, typically near ground electrical potential.

Abstract: The disclosure provides an optical calibration device for in-chamber calibration of optical signals associated with a processing chamber, a characterization system for plasma processing chambers, methods of characterizing plasma processing chambers, and a chamber characterizer. In one example, the optical calibration device includes: (1) an enclosure, (2) an optical source located within the enclosure and configured to provide a source light having a continuous spectrum, and (3) optical shaping elements located within the enclosure and configured to form the source light into a calibrating light that approximates a plasma emission during an operation within the processing chamber.

Abstract: A referenced and stabilized optical measurement system includes a light source, a plurality of optical elements and optical fiber assemblies and a detector arranged to compensate for the effects of system variation which may affect measurement performance. A non-continuous light source provides a common source light on a common source path. A reference light and a measurement light are derived from the common source light and propagated across separate paths of optically matching optical components in order to produce a common signal variation on both the reference light signal and the measurement light signal. Light paths exposed to air are contained indiscrete volumes for purging gasses from the volumes. Ratios of the reference signal and measurement signal are acquired under various conditions for compensating the measurement signal for system variations.

Abstract: An oil control valve assembly includes a valve body and a controller coupled to an exterior end of the valve body. The controller includes a solenoid housing attached to the exterior end of the valve body, and defines an interior region. An encapsulated coil assembly is disposed within the interior region of the solenoid housing. A housing seal is disposed within the interior region of the solenoid housing, in sealing engagement with the solenoid housing, the valve body, and the encapsulated coil assembly. The housing seal is operable to seal the interior region of the solenoid housing to prevent fluid communication between the solenoid housing and the valve body. An adapter assembly is coupled to the valve body to reposition a discharge location of a supply port, a control port, and an exhaust port of the valve body along a longitudinal axis of the valve body.

Abstract: A device for applying a compressive force to the uterus, the device comprising a contact portion for contacting the uterus and providing a compressive force thereto, and at least two elongate handles each extending from the contact portion along a respective longitudinal axis. The at least two elongate handles are configured to facilitate insertion of the device into the body and handling of the device from outside the body when inserted. At least a part of the contact portion is configured to be radially moveable relative to the longitudinal axes between a first radial position and a second radial position where the second radial position is radially outward of the first radial position.

Abstract: An oil control valve assembly includes a valve body and a controller coupled to an exterior end of the valve body. The controller includes a solenoid housing attached to the exterior end of the valve body, and defines an interior region. An encapsulated coil assembly is disposed within the interior region of the solenoid housing. A housing seal is disposed within the interior region of the solenoid housing, in sealing engagement with the solenoid housing, the valve body, and the encapsulated coil assembly. The housing seal is operable to seal the interior region of the solenoid housing to prevent fluid communication between the solenoid housing and the valve body. An adapter assembly is coupled to the valve body to reposition a discharge location of a supply port, a control port, and an exhaust port of the valve body along a longitudinal axis of the valve body.

Abstract: A workpiece characterization system for obtaining simultaneous measurement of layer and photoluminescence properties of a workpiece. The workpiece characterization system includes an excitation light and an illumination light each impinging upon a surface of a workpiece whereby the workpiece emits photoluminescent light and encodes light from said illumination source with layer information. The excitation light and the illumination light are generated from a single light source. The light from the single light source is filtered to remove wavelengths of light that correlate to light wavelengths emitted from the workpiece as a result of excitation. Wavelengths that correlate to light reflected from the workpiece that may contain encoded information are not filtered.

Abstract: The present invention is directed to an apparatus, method and software product for enhancing the dynamic range of a CCD sensor without substantially increasing the noise. Initially, the area of a N×M pixel CCD sensor array is subdivided into two regions, a large region having (M?a) pixels in each column for outputting large-amplitude signals with low noise and a smaller region having a pixels in each column for outputting small-amplitude signals with improved dynamic range. At integration time, the CCD is read out one region's rows at a time into the horizontal shift registers by shifting the pixel charges in either a or M?a vertical shifts. The charges in the horizontal shift registers are then shifted out of the horizontal shift registers in N horizontal shifts. Next, the remaining pixels in the region of the CCD are read out into the horizontal shift registers by shifting the pixel charges in the other of a or M?a vertical shifts.

Abstract: Emitted light from a pulsed plasma system is detected, amplified and digitized over a plurality of pulse modulation cycles to produce a digitized signal over the plurality of RF modulation periods, each of which contains an amount of random intensity variations. The individual signal periods are then mathematically combined to produce a stable local reference waveform signal that has decreased random intensity variations. One mechanism for creating a stable local reference waveform signal is by subdividing each of the individual signal periods into a plurality of subunits and the mathematically averaging the respective subunits within the modulation period to produce the stable local reference waveform signal for the modulation period. The stable local reference waveform signal can then be compared to other instantaneous waveform signals from the pulsed plasma system, or waveform parameters can be derived using various signal processing techniques such as Fourier analysis.

Abstract: An oil control valve assembly includes a valve body and a controller coupled to an exterior end of the valve body. The controller includes a solenoid housing attached to the exterior end of the valve body, and defines an interior region. An encapsulated coil assembly is disposed within the interior region of the solenoid housing. A housing seal is disposed within the interior region of the solenoid housing, in sealing engagement with the solenoid housing, the valve body, and the encapsulated coil assembly. The housing seal is operable to seal the interior region of the solenoid housing to prevent fluid communication between the solenoid housing and the valve body. An adapter assembly is coupled to the valve body to reposition a discharge location of a supply port, a control port, and an exhaust port of the valve body along a longitudinal axis of the valve body.

Abstract: Systems and methods for refining search query results are provided. A first user input is received. A plurality of search categories for the first input are determined. The plurality of search categories are then associated with different segments of a first slider. The first slider allows a user to generate a search query for the first user input among the plurality of associated categories. The search query returns a set of search query results. A plurality of sub categories may be determined for each search category. The plurality of sub-categories are associated with different segments of a second slider. Movement of a slider button of a second slider to a first segment of the second slider may be detected. The search query results may be filtered based on the first segment of the second slider. The filtering adjusts a level of detail of the set of search query results.