Patents by Inventor ANDREY SEMENIN

ANDREY SEMENIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for tuning matching networks
    Patent number: 8513889
    Abstract: Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.
    Type: Grant
    Filed: October 6, 2010
    Date of Patent: August 20, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Chunlei Zhang, Sergio F. Shoji, Andrey Semenin, Kartik Ramaswamy, James P. Cruse, Bryan Liao
  • METHODS AND APPARATUS FOR TUNING MATCHING NETWORKS
    Publication number: 20110162798
    Abstract: Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.
    Type: Application
    Filed: October 6, 2010
    Publication date: July 7, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: CHUNLEI ZHANG, SERGIO F. SHOJI, ANDREY SEMENIN, KARTIK RAMASWAMY, JAMES P. CRUSE, BRYAN LIAO