Patents by Inventor Andrey SIEMENS

Andrey SIEMENS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for depositing material on the surface of a substrate
    Patent number: 11193201
    Abstract: An apparatus with a deposition source and a substrate holder having a source mounting portion, which is rotatable about a first axis, a shielding element, which is disposed between the deposition source and the substrate holder, and a drive arrangement. The deposition source has a material outlet opening from which material is emitted. A longitudinal axis of an elongate central region of the material outlet opening extends parallel and centrally between the edges of the material outlet opening. The deposition source is mounted to the source mounting portion such that the longitudinal axis of the central region is parallel to the first axis. The shielding element has an aperture. The drive arrangement controls rotation of the source mounting portion, adjustment of a width of the aperture, and relative movement between the substrate holder and both the source mounting portion and the shielding element.
    Type: Grant
    Filed: June 24, 2019
    Date of Patent: December 7, 2021
    Assignee: Deutsches Elektronen-Synchrotron DESY
    Inventors: Kai Schlage, Andrey Siemens, Svenja Willing, Christian Adolff, Tatiana Gurieva, Lars Bocklage, Ralf Röhlsberger
  • Apparatus For Depositing Material On The Surface Of A Substrate
    Publication number: 20190390327
    Abstract: An apparatus with a deposition source and a substrate holder having a source mounting portion, which is rotatable about a first axis, a shielding element, which is disposed between the deposition source and the substrate holder, and a drive arrangement. The deposition source has a material outlet opening from which material is emitted. A longitudinal axis of an elongate central region of the material outlet opening extends parallel and centrally between the edges of the material outlet opening. The deposition source is mounted to the source mounting portion such that the longitudinal axis of the central region is parallel to the first axis. The shielding element has an aperture. The drive arrangement controls rotation of the source mounting portion, adjustment of a width of the aperture, and relative movement between the substrate holder and both the source mounting portion and the shielding element.
    Type: Application
    Filed: June 24, 2019
    Publication date: December 26, 2019
    Inventors: Kai SCHLAGE, Andrey SIEMENS, Svenja WILLING, Christian ADOLFF, Tatiana GURIEVA, Lars BOCKLAGE, Ralf RÖHLSBERGER