Patents by Inventor Andrey V. Korolev

Andrey V. Korolev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bis-ketoiminate copper precursors for deposition of copper-containing films and methods thereof
    Patent number: 9121093
    Abstract: Disclosed are processes for the use of bis-ketoiminate copper precursors for the deposition of copper-containing films via Plasma Enhanced Atomic Layer Deposition (PEALD) or Plasma Enhanced Chemical Vapor Deposition (PECVD).
    Type: Grant
    Filed: July 9, 2010
    Date of Patent: September 1, 2015
    Assignee: American Air Liquide, Inc.
    Inventors: Christian Dussarrat, Clément Lansalot-Matras, Vincent M. Omarjee, Andrey V. Korolev
  • Synthesis method for carbosilanes
    Patent number: 9073952
    Abstract: Si(OEt)2[CH2—Si(OEt)3]2 compounds are synthesized by reacting a Grignard reagent having the formula Si(OEt)3(CH2MgCl) with a quenching agent having the formula Si(OEt)2Cl2.
    Type: Grant
    Filed: April 27, 2012
    Date of Patent: July 7, 2015
    Assignees: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, American Air Liquide, Inc., Air Liquide Electronics U.S. LP
    Inventors: Zhiwen Wan, Ziyun Wang, Ashutosh Misra, Jean-Marc Girard, Andrey V. Korolev
  • Heteroleptic (allyl)(pyrroles-2-aldiminate) metal-containing precursors, their synthesis and vapor deposition thereof to deposit metal-containing films
    Patent number: 9034761
    Abstract: Disclosed are metal-containing precursors having the formula Compound (I) wherein: —M is a metal selected from Ni, Co, Mn, Pd; and —each of R-1, R2, R3, R4, R5, R6, R7, R8, R9, and R10 are independently selected from H; a C1-C4 linear, branched, or cyclic alkyl group; a C1-C4 linear, branched, or cyclic alkylsilyl group (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic alkylamino group; or a C1-C4 linear, branched, or cyclic fluoroalkyl group. Also disclosed are methods of synthesizing and using the disclosed metal-containing precursors to deposit metal-containing films on a substrate via a vapor deposition process.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: May 19, 2015
    Assignees: L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, American Air Liquide, Inc.
    Inventors: Clément Lansalot-Matras, Andrey V. Korolev
  • Synthesis methods for carbosilanes
    Patent number: 8859797
    Abstract: A SiH[CH2—Si(OEt)3]3 carbosilane compound is synthesized by reacting a Grignard reagent having the formula Si(OEt)3(CH2MgCl) with a quenching agent having the formula SiHCl3.
    Type: Grant
    Filed: August 22, 2013
    Date of Patent: October 14, 2014
    Assignees: Air Liquide Electronics U.S. LP, L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, American Air Liquide, Inc.
    Inventors: Zhiwen Wan, Ziyun Wang, Ashulosh Misra, Jean-Marc Girard, Claudia Fafard, Andrey V. Korolev
  • HETEROLEPTIC (ALLYL)(PYRROLES-2-ALDIMINATE) METAL-CONTAINING PRECURSORS, THEIR SYNTHESIS AND VAPOR DEPOSITION THEREOF TO DEPOSIT METAL-CONTAINING FILMS
    Publication number: 20140179105
    Abstract: Disclosed are metal-containing precursors having the formula Compound (I) wherein: —M is a metal selected from Ni, Co, Mn, Pd; and —each of R-1, R2, R3, R4, R5, R6, R7, R8, R9, and R10 are independently selected from H; a C1-C4 linear, branched, or cyclic alkyl group; a C1-C4 linear, branched, or cyclic alkylsilyl group (mono, bis, or tris alkyl); a C1-C4 linear, branched, or cyclic alkylamino group; or a C1-C4 linear, branched, or cyclic fluoroalkyl group. Also disclosed are methods of synthesizing and using the disclosed metal-containing precursors to deposit metal-containing films on a substrate via a vapor deposition process.
    Type: Application
    Filed: June 29, 2012
    Publication date: June 26, 2014
    Applicants: American Air Liquide, Inc, L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude
    Inventors: Clement Lansalot-matras, Andrey V. Korolev
  • Heteroleptic pyrrolecarbaldimine precursors
    Patent number: 8691985
    Abstract: Disclosed are precursors having a pyrrolecarbaldiminates ligand and methods of synthesizing the same. The pyrrolecarbaldiminates ligand may be substituted.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: April 8, 2014
    Assignee: American Air Liquide, Inc.
    Inventors: Andrey V. Korolev, Clément Lansalot-Matras
  • Synthesis method for copper compounds
    Patent number: 8692010
    Abstract: Disclosed are synthesis methods to produce copper bis-ketoiminate and copper bis-ketiminate compounds.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: April 8, 2014
    Assignee: American Air Liquide, Inc.
    Inventors: Andrey V. Korolev, Venkateswara R. Pallem
  • Heteroleptic pyrrolecarbaldimine precursors
    Patent number: 8686138
    Abstract: Disclosed are precursors having a pyrrolecarbaldiminates ligand and methods of synthesizing the same. The pyrrolecarbaldiminates ligand may be substituted.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: April 1, 2014
    Assignee: American Air Liquide, Inc.
    Inventors: Andrey V. Korolev, Clément Lansalot-Matras
  • LIQUID PHASE SYNTHESIS OF TRISILYLAMINE
    Publication number: 20130209343
    Abstract: Disclosed are liquid phase synthesis methods to produce trisilylamine.
    Type: Application
    Filed: February 10, 2012
    Publication date: August 15, 2013
    Applicant: American Air Liquide, Inc.
    Inventor: Andrey V. KOROLEV
  • Heteroleptic pyrrolecarbaldimine precursors
    Patent number: 8431719
    Abstract: Disclosed are precursors having a pyrrolecarbaldiminates ligand and methods of synthesizing the same. The pyrrolecarbaldiminates ligand may be substituted.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: April 30, 2013
    Assignee: American Air Liquide, Inc.
    Inventors: Andrey V. Korolev, Clément Lansalot-Matras
  • Heteroleptic Pyrrolecarbaldimine Precursors
    Publication number: 20130023669
    Abstract: Disclosed are precursors having a pyrrolecarbaldiminates ligand and methods of synthesizing the same. The pyrrolecarbaldiminates ligand may be substituted.
    Type: Application
    Filed: December 30, 2011
    Publication date: January 24, 2013
    Applicants: American Air Liquide, Inc., L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Andrey V. Korolev, Clément Lansalot-Matras
  • Heteroleptic Pyrrolecarbaldimine Precursors
    Publication number: 20130023670
    Abstract: Disclosed are precursors having a pyrrolecarbaldiminates ligand and methods of synthesizing the same. The pyrrolecarbaldiminates ligand may be substituted.
    Type: Application
    Filed: December 30, 2011
    Publication date: January 24, 2013
    Applicants: American Air Liquide, Inc., L'Air Liquide Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude
    Inventors: Andrey V. Korolev, Clément Lansalot-Matras
  • BIS-KETOIMINATE COPPER PRECURSORS FOR DEPOSITION OF COPPER-CONTAINING FILMS
    Publication number: 20120321817
    Abstract: Disclosed are processes for the use of bis-ketoiminate copper precursors for the deposition of copper-containing films via Plasma Enhanced Atomic Layer Deposition (PEALD) or Plasma Enhanced Chemical Vapor Deposition (PECVD).
    Type: Application
    Filed: July 9, 2010
    Publication date: December 20, 2012
    Inventors: Christian Dussarrat, Clément Lansalot-Matras, Vincent M. Omarjee, Andrey V. Korolev