Abstract: Seal for a vacuum valve comprising a circular base element, wherein the base element has a non-circular cross-section having an outer side extending in an axial direction and an inner side extending radially such that the inner side of the seal can be clampingly fixed in a sealing element of a valve. Further, the present invention relates to a sealing element, such a seal and a valve with such a sealing element.

Abstract: A lubricant recovery system for vacuum pump comprising a reservoir to store lubricant. Supply lines connected to the reservoir wherein the supply line can be connected to the vacuum pump to supply the lubricant to the vacuum pump. Further, a return line is connected to the reservoir to return a lubricant-air mixture from the vacuum pump to the reservoir by the return line. An air filter is disposed inside the reservoir to separate lubricant from the air wherein the filter is connected to a scavenge line which is connectable to a low-pressure region of the vacuum pump such that lubricant separated from the lubricant-air mixture by the air filter is drawn via the scavenge line into the vacuum pump. In accordance to the present invention a valve is disposed in the scavenge line to selectively separate the air filter from the vacuum pump.

Abstract: An inlet valve for regulating the pressure at the inlet channel of a vacuum pump comprising: a first chamber defined by a housing having at least one inlet channel connected to a first supply of a fluid, comprising a movable element defining two cavities fluidly sealed from each-other and means for exerting a force on the movable element; a second chamber separated from the first chamber by a wall and defined by a housing, being in direct communication with a process channel of a second supply of a fluid; a valve body slidably mounted in the wall to prevent a fluid flow between the second chamber and the second cavity of the first chamber, the valve body having a distal end and a proximal end, wherein the valve body comprises a fluid channel extending through the valve body allowing a fluid flow between the first cavity and the inlet channel.

Abstract: A dry scroll vacuum pump includes a fixed scroll, a drive shaft having an axis and an eccentric shaft portion, an orbiting scroll connected to the eccentric shaft portion so that during use rotation of the shaft imparts an orbiting motion to the orbiting scroll relative to the fixed scroll for pumping gas between a mechanism inlet and a mechanism outlet of a scroll mechanism comprising the scrolls; an inlet vacuum region for conveying gas from the pump inlet to the mechanism inlet; a cooling flow path formed inside the orbiting scroll for guiding a cooling fluid for cooling the orbiting scroll, the cooling flow path having a fluid inlet; and a sealing arrangement for sealing the fluid inlet from the inlet vacuum region so a cooling fluid can be conveyed across the inlet vacuum region through the sealing arrangement to the fluid inlet.

Abstract: An inlet valve for regulating the pressure at the inlet channel of a vacuum pump comprising: a first chamber defined by a housing having at least one inlet channel connected to a first supply of a fluid, comprising a movable element defining two cavities fluidly sealed from each-other and means for exerting a force on the movable element; a second chamber separated from the first chamber by a wall and defined by a housing, being in direct communication with a process channel of a second supply of a fluid; a valve body slidably mounted in the wall to prevent a fluid flow between the second chamber and the second cavity of the first chamber, the valve body having a distal end and a proximal end, wherein the valve body comprises a fluid channel extending through the valve body allowing a fluid flow between the first cavity and the inlet channel.