Patents by Inventor Andrzei Kaszuba
Andrzei Kaszuba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8597011Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: GrantFiled: December 22, 2010Date of Patent: December 3, 2013Assignee: Applied Materials, Inc.Inventors: Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ashish Shah, Inna Shmurun
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Patent number: 8203126Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: GrantFiled: July 22, 2010Date of Patent: June 19, 2012Assignee: Applied Materials, Inc.Inventors: Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Dustin W. Ho, Andrzei Kaszuba, Tom K. Cho
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Publication number: 20120003398Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: ApplicationFiled: December 22, 2010Publication date: January 5, 2012Applicant: Applied Materials, Inc.Inventors: Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ashish Shah, Inna Shmurun
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Patent number: 7909595Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: GrantFiled: March 15, 2007Date of Patent: March 22, 2011Assignee: Applied Materials, Inc.Inventors: Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ashish Shah, Inna Shmurun
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Publication number: 20100285240Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: ApplicationFiled: July 22, 2010Publication date: November 11, 2010Applicant: Applied Materials, IncInventors: Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Dustin W. Ho, Andrzei Kaszuba, Tom K. Cho
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Patent number: 7777198Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: GrantFiled: March 15, 2007Date of Patent: August 17, 2010Assignee: Applied Materials, Inc.Inventors: Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Dustin W. Ho, Andrzei Kaszuba, Tom K. Cho
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Patent number: 7692171Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: GrantFiled: March 15, 2007Date of Patent: April 6, 2010Inventors: Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tom K. Cho, Hichem M'Saad, Scott A. Hendrickson, Dustin W. Ho, Thomas Nowak
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Patent number: 7589336Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: GrantFiled: March 15, 2007Date of Patent: September 15, 2009Assignee: Applied Materials, Inc.Inventors: Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ndanka O. Mukuti
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Patent number: 7566891Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: GrantFiled: March 15, 2007Date of Patent: July 28, 2009Assignee: Applied Materials, Inc.Inventors: Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Dustin W. Ho, Andrzei Kaszuba, Tom K. Cho
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Patent number: 7354288Abstract: A substrate support comprises a ceramic disc with an electrode that is chargeable through an electrode terminal. An electrical connector connects an external power source to the electrode terminal. The electrical connector has a pair of opposing pincer arms, a groove sized to fit around the electrode terminal, and a pair of through holes to receive a tightening assembly capable of tightening the opposing pincer arms about the electrode terminal.Type: GrantFiled: June 3, 2005Date of Patent: April 8, 2008Assignee: Applied Materials, Inc.Inventors: Kazutoshi Maehara, Visweswaren Sivaramakrishnan, Kentaro Wada, Mark A. Fodor, Andrzei Kaszuba
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Publication number: 20080067425Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: ApplicationFiled: March 15, 2007Publication date: March 20, 2008Applicant: Applied Materials, Inc.Inventors: Andrzei Kaszuba, Juan Rocha-Alvarez, Sanjeev Baluja, Tom Cho, Hichem M'Saad, Scott Hendrickson, Dustin Ho, Thomas Nowak
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Publication number: 20070286963Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: ApplicationFiled: March 15, 2007Publication date: December 13, 2007Applicant: Applied Materials, Inc.Inventors: Juan Rocha-Alvarez, Thomas Nowak, Dale Du Bois, Sanjeev Baluja, Scott Hendrickson, Dustin Ho, Andrzei Kaszuba, Tom Cho
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Publication number: 20070257205Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: ApplicationFiled: March 15, 2007Publication date: November 8, 2007Applicant: Applied Materials, Inc.Inventors: Juan Rocha-Alvarez, Thomas Nowak, Dale Du Bois, Sanjeev Baluja, Scott Hendrickson, Dustin Ho, Andrzei Kaszuba, Tom Cho
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Publication number: 20070228618Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: ApplicationFiled: March 15, 2007Publication date: October 4, 2007Applicant: Applied Materials, Inc.Inventors: Andrzei Kaszuba, Juan Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ashish Shah, Inna Shmurun
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Publication number: 20070228289Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.Type: ApplicationFiled: March 15, 2007Publication date: October 4, 2007Applicant: Applied Materials, Inc.Inventors: Andrzei Kaszuba, Juan Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ndanka Mukuti
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Publication number: 20060272774Abstract: A substrate support comprises a ceramic disc with an electrode that is chargeable through an electrode terminal. An electrical connector connects an external power source to the electrode terminal. The electrical connector has a pair of opposing pincer arms, a groove sized to fit around the electrode terminal, and a pair of through holes to receive a tightening assembly capable of tightening the opposing pincer arms about the electrode terminal.Type: ApplicationFiled: June 3, 2005Publication date: December 7, 2006Inventors: Kazutoshi Maehara, Visweswaren Sivaramakrishnan, Kentaro Wada, Mark Fodor, Andrzei Kaszuba