Patents by Inventor Andy Desepte

Andy Desepte has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140060739
    Abstract: Methods and apparatus for operating the plasma processing chamber of a plasma processing tool in at least two modes are disclosed. In the first mode, the substrate-bearing assembly is movable within a gap-adjustable range to adjust the gap between the electrodes to accommodate different processing requirements. In this first mode, RF ground return path continuity is maintained irrespective of the gap distance as long as the gap distance is within the gap-adjustable range. In the second mode, the substrate bearing assembly is capable of moving to further open the gap to accommodate unimpeded substrate loading/unloading.
    Type: Application
    Filed: October 26, 2012
    Publication date: March 6, 2014
    Inventors: Rajinder Dhindsa, Alexei Marakhtanov, Michael C. Kellogg, Andy Desepte, Andrew D. Bailey, III