Patents by Inventor Andy Mirza

Andy Mirza has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pressure sensor method of fabrication
    Patent number: 5632854
    Abstract: A pressure sensor (11) and its method of fabrication include etching a V-groove (19) in a first surface (16) of a first substrate (12), bonding a second substrate (24) to the first substrate (12), thinning the second substrate (24) to form a diaphragm (32) overlying the V-groove (19), and etching a port (38) from the second surface (18) of the first substrate (12) to the V-groove (19). Tetra-methyl-ammonium-hydroxide is preferably used to anisotropically etch the V-groove (19), and an anisotropic plasma reactive ion etch is preferably used to etch the port (38).
    Type: Grant
    Filed: August 21, 1995
    Date of Patent: May 27, 1997
    Assignee: Motorola, Inc.
    Inventors: Andy Mirza, Ljubisa Ristic